Substrate processing apparatus
US-11024520-B2 · Jun 1, 2021 · US
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Patent family 56976202
This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56976202 |
| Family type | — |
| Earliest priority | Mar 24, 2015 |
| First filing country | US |
| Member publications | 5 |
| Countries | US |
| Representative publication | US11024520B2 — Substrate processing apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US11024520B2 — Substrate processing apparatus (published Jun 1, 2021)
Member publications
Related publications in this family.
Substrate processing apparatus
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Substrate processing apparatus
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Substrate processing apparatus
US-10468274-B2 · Nov 5, 2019 · US
Substrate processing apparatus
US-2016284571-A1 · Sep 29, 2016 · US