Chemical mechanical polishing machine and polishing head assembly
US-10195715-B2 · Feb 5, 2019 · US
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Patent family 51351525
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51351525 |
| Family type | — |
| Earliest priority | Feb 19, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10195715B2 — Chemical mechanical polishing machine and polishing head assembly |
Representative publication
Best representative member for this family based on priority and filing country.
US10195715B2 — Chemical mechanical polishing machine and polishing head assembly (published Feb 5, 2019)
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