Process chamber for field guided exposure and method for implementing the process chamber
US-11003080-B2 · May 11, 2021 · US
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Electricity
Electricity · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H05H2001/485 |
| Official title | — |
| Display label | Electricity (mapped technology topic) |
| Total patents | 9 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly declining.
| Year | Patents |
|---|---|
| 2016 | 4 |
| 2017 | 1 |
| 2018 | 2 |
| 2019 | 1 |
| 2021 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Plasma generating apparatus for secondary battery and lamination system comprising the same
US-2019215944-A1 · Jul 11, 2019 · US
Process chamber for field guided exposure and method for implementing the process chamber
US-10095114-B2 · Oct 9, 2018 · US
Vapor deposition apparatus having pretreatment device that uses plasma
US-2018171480-A1 · Jun 21, 2018 · US
Reactive-species supply device and surface treatment apparatus
US-9713241-B2 · Jul 18, 2017 · US
Reactive-species supply device and surface treatment apparatus
US-9452481-B2 · Sep 27, 2016 · US
Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma
US-9373484-B2 · Jun 21, 2016 · US
Ion implantation device
US-9336991-B2 · May 10, 2016 · US
Ion implantation device
US-9330880-B2 · May 3, 2016 · US