Process chamber for field guided exposure and method for implementing the process chamber

Patent metadata

Field	Value
Publication number	US-10095114-B2
Application number	US-201514589987-A
Country	US
Kind code	B2
Filing date	Jan 5, 2015
Priority date	Nov 14, 2014
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

A method and apparatus disclosed herein apply to processing a substrate, and more specifically to a method and apparatus for improving photolithography processes. The apparatus includes a chamber body, a substrate support disposed within the chamber body, and an electrode assembly. The substrate support has a top plate disposed above the substrate support, a bottom plate disposed below the substrate support, and a plurality of electrodes connecting the top plate to the bottom plate. A voltage is applied to the plurality of electrodes to generate an electric field. Methods for exposing a photoresist layer on a substrate to an electric field are also disclosed herein.

First claim

What is claimed is:

1. A processing chamber comprising:
a chamber body;
a substrate support disposed in the chamber body; and
an electrode assembly configured to couple to a power source, the electrode assembly comprising:
a top plate disposed above the substrate support;
a bottom plate having an opening therethough, wherein a portion of the substrate support is disposed through the opening; and
a plurality of electrodes in a cylindrical arrangement connecting the top plate to the bottom plate, wherein at least one electrode of the plurality of electrodes is operable to disengage from the bottom plate.

2. The processing chamber of claim 1 , wherein the plurality of electrodes are disposed inside the chamber body.

3. The processing chamber of claim 1 further comprising:
a voltage control mechanism configured to independently control voltage provided to each of the electrodes.

4. The processing chamber of claim 3 , wherein the voltage control mechanism is configured to independently control voltage provided to a first electrode of the plurality of electrodes based on an angular orientation of the first electrode.

5. The processing chamber of claim 1 , wherein the substrate support assembly is rotatable.

6. A processing chamber comprising:
a chamber body;
a substrate support disposed in the chamber body; and
an electrode assembly disposed in a processing volume defined by the chamber body and configured to couple to a power source, the electrode assembly comprising:
a top plate disposed above the substrate support;
a bottom plate disposed below the substrate support; and
a plurality of electrodes in a cylindrical arrangement connecting the top plate to the bottom plate, each electrode in the plurality of electrodes having a first end and a second end, the first end contacting the top plate and the second end contacting the bottom plate, wherein a portion of the plurality of electrodes is operable between a position where the second end of the electrode contacts the bottom plate and a position where the second end of the electrode is spaced from the bottom plate.

7. The processing chamber of claim 6 , wherein the portion of the plurality of electrodes is displaced vertically to electrically connect and disconnect the top plate to the bottom plate.

8. The processing chamber of claim 6 further comprising:
a voltage control mechanism configured to independently control voltage provided to each of the electrodes.

9. The processing chamber of claim 8 , wherein the voltage control mechanism is configured to independently control voltage provided to a first electrode of the plurality of electrodes based on an angular orientation of the first electrode.

10. The processing chamber of claim 6 , wherein the substrate support assembly is rotatable.

11. A processing chamber comprising:
a chamber body;
a substrate support disposed in the chamber body coupled to a shaft; and
an electrode assembly configured to couple to a power source, the electrode assembly comprising:
a top plate disposed above the substrate support;
a bottom plate disposed below the substrate support surrounding the shaft; and
a plurality of electrodes in a cylindrical arrangement within the chamber body connecting the top plate to the bottom plate, wherein a portion of the plurality of electrodes is displaced vertically to electrically connect and disconnect the top plate to the bottom plate.

12. The processing chamber of claim 11 further comprising:
a voltage control mechanism configured to independently control voltage provided to each of the electrodes.

13. The processing chamber of claim 12 , wherein the voltage control mechanism is configured to independently control voltage provided to a first electrode of the plurality of electrodes based on an angular orientation of the first electrode.

14. The processing chamber of claim 11 , wherein the substrate support assembly is rotatable.

Assignees

• Applied Materials Inc

Inventors

• Ramaswamy Kartik
• Nemani Srinivas D

Classifications

• H05H2001/2462

  Electricity · mapped topic

• G03F7/26

  Processing photosensitive materials; Apparatus therefor (G03F7/12 - G03F7/24 take precedence) · CPC title

• H01J11/22

  Electrodes, e.g. special shape, material or configuration · CPC title

• H05H2001/485

  Electricity · mapped topic

• H01J37/32541

  Shape · CPC title