Systems and methods for lithographic tools with increased tolerances
US-12461449-B2 · Nov 4, 2025 · US
Rotary scanning
Rotary scanning · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G03F7/70366 |
| Official title | {Rotary scanning} |
| Display label | Rotary scanning |
| Total patents | 49 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 5 |
| 2016 | 5 |
| 2017 | 5 |
| 2018 | 4 |
| 2019 | 4 |
| 2020 | 9 |
| 2021 | 3 |
| 2022 | 4 |
| 2023 | 2 |
| 2024 | 5 |
| 2025 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Apparatus and method for determining an angular reflectivity profile
US-2025237962-A1 · Jul 24, 2025 · US
Systems and methods for lithographic tools with increased tolerances
US-2025021012-A1 · Jan 16, 2025 · US
Method and apparatus for direct writing photoetching by parallel interpenetrating super-resolution high-speed laser
US-12130554-B2 · Oct 29, 2024 · US
Master, transfer copy, and method for manufacturing master
US-12083713-B2 · Sep 10, 2024 · US
Exposure method, exposure device, and method of forming optically-anisotropic layer
US-2024288678-A1 · Aug 29, 2024 · US
Method and apparatus for direct writing photoetching by parallel interpenetrating super-resolution high-speed laser
US-2024176244-A1 · May 30, 2024 · US
Drawing apparatus and drawing method
US-2024168386-A1 · May 23, 2024 · US
Master, transfer copy, and method for manufacturing master
US-2023182349-A1 · Jun 15, 2023 · US
Master, transfer copy, and method for manufacturing master
US-11602878-B2 · Mar 14, 2023 · US
Method to fabricate large scale flat optics lenses
US-2022308460-A1 · Sep 29, 2022 · US
Supporting an optical element
US-11314177-B2 · Apr 26, 2022 · US
System and method for overlay error reduction
US-2022100103-A1 · Mar 31, 2022 · US
System and method for overlay error reduction
US-11287746-B1 · Mar 29, 2022 · US
Substrate processing apparatus, processing apparatus, and method for manufacturing device
US-11073767-B2 · Jul 27, 2021 · US
Dense line extreme ultraviolet lithography system with distortion matching
US-11067900-B2 · Jul 20, 2021 · US
Supporting an optical element
US-2021181644-A1 · Jun 17, 2021 · US
Dense line extreme ultraviolet lithography system with distortion matching
US-2020326633-A1 · Oct 15, 2020 · US
Substrate processing apparatus, processing apparatus, and method for manufacturing device
US-2020310253-A1 · Oct 1, 2020 · US
Shutter device used for exposure in lithography machine, and method for use thereof
US-10712668-B2 · Jul 14, 2020 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC G03F7/70366?
- CPC G03F7/70366 is the Cooperative Patent Classification code for “Rotary scanning.”
- How many patents are filed under CPC G03F7/70366 (Rotary scanning)?
- Our database includes 49 publications tagged with this CPC code.
- Is patent activity under CPC G03F7/70366 growing?
- Publication counts under this code: 5 in 2024 vs 3 in 2025 (latest complete years).