Lithographic apparatus and a method of operating the apparatus
US-10151984-B2 · Dec 11, 2018 · US
Details
Details · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G03B27/52 |
| Official title | Details |
| Display label | Details |
| Total patents | 79 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 19 |
| 2016 | 12 |
| 2017 | 17 |
| 2018 | 13 |
| 2019 | 4 |
| 2020 | 4 |
| 2021 | 6 |
| 2023 | 1 |
| 2024 | 1 |
| 2025 | 2 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Image processing apparatus, image forming system, and printing method that decide whether to store, print and not store, or print and store image data
US-10115043-B2 · Oct 30, 2018 · US
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
US-2018292762-A1 · Oct 11, 2018 · US
Lithographic apparatus and device manufacturing method
US-10088755-B2 · Oct 2, 2018 · US
Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US-2018231898-A1 · Aug 16, 2018 · US
Exposure apparatus and method for producing device
US-2018196352-A1 · Jul 12, 2018 · US
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
US-10018925-B2 · Jul 10, 2018 · US
Method for adjusting a projection objective
US-10018918-B2 · Jul 10, 2018 · US
Dual stage lithographic apparatus and device manufacturing method
US-RE46933-E · Jul 3, 2018 · US
Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US-9946163-B2 · Apr 17, 2018 · US
Exposure apparatus and method for producing device
US-9939739-B2 · Apr 10, 2018 · US
Method For Adjusting A Projection Objective
US-2018024440-A1 · Jan 25, 2018 · US
A fluid handling structure, a lithographic apparatus and a device manufacturing method
US-2017363948-A1 · Dec 21, 2017 · US
Photolithography systems and associated methods of overlay error correction
US-9817392-B2 · Nov 14, 2017 · US
Interconnectable ultrasound transducer probes and related methods and apparatus
US-2017303897-A1 · Oct 26, 2017 · US
Lithographic apparatus and device manufacturing method
US-2017285489-A1 · Oct 5, 2017 · US
Lithographic apparatus and a method of operating the apparatus
US-2017285487-A1 · Oct 5, 2017 · US
Interconnectable ultrasound transducer probes and related methods and apparatus
US-2017258443-A1 · Sep 14, 2017 · US
Method for adjusting a projection objective
US-9715177-B2 · Jul 25, 2017 · US
Lithographic apparatus and device manufacturing method
US-9715179-B2 · Jul 25, 2017 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC G03B27/52?
- CPC G03B27/52 is the Cooperative Patent Classification code for “Details.”
- How many patents are filed under CPC G03B27/52 (Details)?
- Our database includes 79 publications tagged with this CPC code.
- Is patent activity under CPC G03B27/52 growing?
- Publication counts under this code: 1 in 2024 vs 2 in 2025 (latest complete years).