Heating of the deposition chamber, the substrate or the materials to be evaporated

Heating of the deposition chamber, the substrate or the materials to be evaporated · Cooperative Patent Classification (CPC)

Chemical and metallurgical processes, compounds, and materials.

Related technology areas

Mapped technology topics for this CPC code.

CPC classification statistics
MetricValue
CPC codeC30B23/06
Official titleHeating of the deposition chamber, the substrate or the materials to be evaporated
Display labelHeating of the deposition chamber, the substrate or the materials to be evaporated
Total patents235

Filing trend

Year-over-year patent counts classified under this CPC code.

Filing activity over the last five years is stable.

Patents filed per year
YearPatents
20158
201619
201713
201811
201922
202020
202128
202228
202319
202430
202530
20267

Representative patents

Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.

Frequently asked questions

Answers are generated from the same data shown on this page.

What is CPC C30B23/06?
CPC C30B23/06 is the Cooperative Patent Classification code for “Heating of the deposition chamber, the substrate or the materials to be evaporated.”
How many patents are filed under CPC C30B23/06 (Heating of the deposition chamber, the substrate or the materials to be evaporated)?
Our database includes 235 publications tagged with this CPC code.
Is patent activity under CPC C30B23/06 growing?
Publication counts under this code: 30 in 2024 vs 30 in 2025 (latest complete years).