Method of manufacturing silicon carbide single crystal

Patent metadata

Field	Value
Publication number	US-9856583-B2
Application number	US-201514817662-A
Country	US
Kind code	B2
Filing date	Aug 4, 2015
Priority date	Nov 18, 2014
Publication date	Jan 2, 2018
Grant date	Jan 2, 2018

Abstract

A method of manufacturing a silicon carbide single crystal includes steps of preparing a crucible, a source material disposed toward a bottom surface in the crucible, a seed crystal disposed to face the source material toward a top surface in the crucible, a resistive heater, and a heat insulator configured to be able to accommodate the crucible therein, measuring a mass of at least a portion of the heat insulator, comparing a measured value of the mass obtained in the measuring step with a threshold value, and growing a silicon carbide single crystal on the seed crystal by sublimation of the source material by heating the crucible placed in the heat insulator with the resistive heater. When the measured value of the mass is lower than the threshold value in the comparing step, the step of growing a silicon carbide single crystal is performed at least one or more times.

First claim

What is claimed is:

1. A method of manufacturing a silicon carbide single crystal, comprising steps of:
preparing
a crucible having a top surface, a bottom surface opposite to said top surface, and a tubular side surface located between said top surface and said bottom surface,
a source material disposed toward said bottom surface in said crucible,
a seed crystal disposed to face said source material toward said top surface in said crucible,
a heater for heating said crucible, and
a heat insulator configured to be able to accommodate said crucible therein;

measuring a mass of at least a portion of said heat insulator;
comparing a measured value of said mass obtained in said measuring step with a threshold value that is derived from a correlation between rate of increase of thermal conductivity and rate of increase of mass of said heat insulator; and
growing a silicon carbide single crystal on said seed crystal by sublimation of said source material by heating said crucible placed in said heat insulator with said heater,
when said measured value of said mass is lower than said threshold value in said comparing step, said step of growing a silicon carbide single crystal being performed at least one or more times.

2. The method of manufacturing a silicon carbide single crystal according to claim 1 , further comprising a step of, when said measured value of said mass is equal to or higher than said threshold value in said comparing step, replacing said heat insulator with another heat insulator whose measured value of mass is lower than said threshold value, wherein
after said replacing step, said step of growing a silicon carbide single crystal is performed.

3. The method of manufacturing a silicon carbide single crystal according to claim 2 , wherein
said heat insulator includes a first heat insulating unit provided to cover said top surface, a second heat insulating unit provided to cover said side surface, and a third heat insulating unit provided to cover said bottom surface, said first to third heat insulating units being separable from each other, and
in said measuring step, said at least a portion of said heat insulator includes said first heat insulating unit.

4. The method of manufacturing a silicon carbide single crystal according to claim 3 , wherein
said second heat insulating unit includes a plurality of heat insulating portions provided between said first heat insulating unit and said third heat insulating unit and arranged such that they can be separated from each other, and
in said measuring step, said at least a portion of said heat insulator further includes one of said heat insulating portions directly connected to said first heat insulating unit.

5. The method of manufacturing a silicon carbide single crystal according to claim 2 , wherein
said heat insulator includes a first heat insulating unit provided to cover said top surface, a second heat insulating unit provided to cover said side surface, and a third heat insulating unit provided to cover said bottom surface, said first to third heat insulating units being separable from each other, and
in said measuring step, a mass of a portion removed from one of said first heat insulating unit, said second heat insulating unit and said third heat insulating unit is measured.

6. The method of manufacturing a silicon carbide single crystal according to claim 1 , wherein
said heat insulator includes a first heat insulating unit provided to cover said top surface, a second heat insulating unit provided to cover said side surface, and a third heat insulating unit provided to cover said bottom surface, said first to third heat insulating units being separable from each other, and
in said measuring step, said at least a portion of said heat insulator includes said first heat insulating unit.

7. The method of manufacturing a silicon carbide single crystal according to claim 6 , wherein
said second heat insulating unit includes a plurality of heat insulating portions provided between said first heat insulating unit and said third heat insulating unit and arranged such that they can be separated from each other, and
in said measuring step, said at least a portion of said heat insulator further includes one of said heat insulating portions directly connected to said first heat insulating unit.

8. The method of manufacturing a silicon carbide single crystal according to claim 1 , wherein
said heat insulator includes a first heat insulating unit provided to cover said top surface, a second heat insulating unit provided to cover said side surface, and a third heat insulating unit provided to cover said bottom surface, said first to third heat insulating units being separable from each other, and
in said measuring step, a mass of a portion removed from one of said first heat insulating unit, said second heat insulating unit and said third heat insulating unit is measured.

Assignees

• Sumitomo Electric Industries

Inventors

• Harada Shin
• Hori Tsutomu

Classifications

• C30B29/36 Primary

  Carbides · CPC title

• C30B35/002

  Crucibles or containers · CPC title

• C30B23/06

  Heating of the deposition chamber, the substrate or the materials to be evaporated · CPC title