Methods and systems for depositing a layer
US-12584221-B2 · Mar 24, 2026 · US
Radiation by charged particles, e.g. electron beams or ion irradiation
Radiation by charged particles, e.g. electron beams or ion irradiation · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C18/145 |
| Official title | {Radiation by charged particles, e.g. electron beams or ion irradiation} |
| Display label | Radiation by charged particles, e.g. electron beams or ion irradiation |
| Total patents | 49 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly declining.
| Year | Patents |
|---|---|
| 2015 | 9 |
| 2016 | 3 |
| 2017 | 2 |
| 2018 | 4 |
| 2019 | 4 |
| 2020 | 2 |
| 2021 | 6 |
| 2022 | 4 |
| 2023 | 7 |
| 2024 | 6 |
| 2025 | 1 |
| 2026 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Vacuum-integrated hardmask processes and apparatus
US-2025053080-A1 · Feb 13, 2025 · US
Barrier film
US-12098258-B2 · Sep 24, 2024 · US
Barrier film
US-12091519-B2 · Sep 17, 2024 · US
Systems and methods of electron beam induced processing
US-12059698-B2 · Aug 13, 2024 · US
Film forming apparatus and method for manufacturing part having film containing silicon
US-2024207882-A1 · Jun 27, 2024 · US
Barrier film
US-12006575-B2 · Jun 11, 2024 · US
Film forming apparatus and method for manufacturing part having film containing silicon
US-11919032-B2 · Mar 5, 2024 · US
Fully open-air combustion deposition and rapid plasma treatment of metal oxides
US-2023407475-A1 · Dec 21, 2023 · US
Vacuum-integrated hardmask processes and apparatus
US-2023273516-A1 · Aug 31, 2023 · US
Vacuum-integrated hardmask processes and apparatus
US-2023266662-A1 · Aug 24, 2023 · US
Methods and systems for depositing a layer
US-2023243036-A1 · Aug 3, 2023 · US
Systems and methods of electron beam induced processing
US-2023158520-A1 · May 25, 2023 · US
Methods for forming a layer comprising a condensing and a curing step
US-11643726-B2 · May 9, 2023 · US
Systems and methods of electron beam induced processing
US-11583875-B2 · Feb 21, 2023 · US
Methods and systems for depositing a layer
US-2022235460-A1 · Jul 28, 2022 · US
Vacuum-integrated hardmask processes and apparatus
US-2022075260-A1 · Mar 10, 2022 · US
Barrier film
US-2022064395-A1 · Mar 3, 2022 · US
Film forming apparatus and method for manufacturing part having film containing silicon
US-2022062943-A1 · Mar 3, 2022 · US
Vacuum-integrated hardmask processes and apparatus
US-11209729-B2 · Dec 28, 2021 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C18/145?
- CPC C23C18/145 is the Cooperative Patent Classification code for “Radiation by charged particles, e.g. electron beams or ion irradiation.”
- How many patents are filed under CPC C23C18/145 (Radiation by charged particles, e.g. electron beams or ion irradiation)?
- Our database includes 49 publications tagged with this CPC code.
- Is patent activity under CPC C23C18/145 growing?
- Publication counts under this code: 6 in 2024 vs 1 in 2025 (latest complete years).