Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same
US-2019368044-A1 · Dec 5, 2019 · US
using microwave discharges
using microwave discharges · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C16/274 |
| Official title | {using microwave discharges} |
| Display label | using microwave discharges |
| Total patents | 186 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 7 |
| 2016 | 14 |
| 2017 | 21 |
| 2018 | 13 |
| 2019 | 25 |
| 2020 | 21 |
| 2021 | 15 |
| 2022 | 23 |
| 2023 | 16 |
| 2024 | 11 |
| 2025 | 15 |
| 2026 | 5 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Method of forming an optically-finished thin diamond film, diamond substrate, or diamond window of high aspect ratio
US-10494713-B2 · Dec 3, 2019 · US
Highly Twinned, Oriented Polycrystalline Diamond Film and Method of Manufacture Thereof
US-2019326030-A1 · Oct 24, 2019 · US
Microwave plasma reactor for manufacturing synthetic diamond material
US-2019318917-A1 · Oct 17, 2019 · US
Thick optical quality synthetic polycrystalline diamond material with low bulk absorption and low microfeature density
US-2019003043-A1 · Jan 3, 2019 · US
ULTRA SMALL GRAIN-SIZE NANOCRYSTALLINE DIAMOND FILM HAVING A SiV PHOTOLUMINESCENCE AND MANUFACTURING METHOD THEREOF
US-2018327927-A1 · Nov 15, 2018 · US
Method of fabricating a diamond membrane
US-10119201-B2 · Nov 6, 2018 · US
Phosphorus incorporation for n-type doping of diamond with (100) and related surface orientation
US-10121657-B2 · Nov 6, 2018 · US
Substrate holder, plasma reactor and method for depositing diamond
US-10100433-B2 · Oct 16, 2018 · US
Method of fabricating a plurality of single crystal cvd synthetic diamonds
US-2018266013-A1 · Sep 20, 2018 · US
Microwave generators and manufacture of synthetic diamond material
US-2018218881-A1 · Aug 2, 2018 · US
Method of manufacturing diamond substrate, diamond substrate, and diamond composite substrate
US-2018209038-A1 · Jul 26, 2018 · US
Plasma etching of diamond surfaces
US-10011491-B2 · Jul 3, 2018 · US
Large area optical quality synthetic polycrystalline diamond window
US-2018179626-A1 · Jun 28, 2018 · US
High-frequency wave supplying structure
US-9957610-B2 · May 1, 2018 · US
Large area optical quality synthetic polycrystalline diamond window
US-9909209-B2 · Mar 6, 2018 · US
High-frequency wave supplying structure
US-2018030594-A1 · Feb 1, 2018 · US
Nanocrystalline diamond carbon film for 3D NAND hardmask application
US-9865464-B2 · Jan 9, 2018 · US
Transparent nanocrystalline diamond coatings and devices
US-2017372896-A1 · Dec 28, 2017 · US
Phosphorus incorporation for n-type doping of diamond with (100) and related surface orientation
US-2017330746-A1 · Nov 16, 2017 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C16/274?
- CPC C23C16/274 is the Cooperative Patent Classification code for “using microwave discharges.”
- How many patents are filed under CPC C23C16/274 (using microwave discharges)?
- Our database includes 186 publications tagged with this CPC code.
- Is patent activity under CPC C23C16/274 growing?
- Publication counts under this code: 11 in 2024 vs 15 in 2025 (latest complete years).