Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
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Kurita Shinichi patents
Kurita Shinichi holds 9 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 9 |
| Recent patents | 0 |
| First publication | Jul 7, 2015 |
| Latest publication | Apr 23, 2019 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Vertical inline CVD system
US-9922854-B2 · Mar 20, 2018 · US
Anodized showerhead
US-9758869-B2 · Sep 12, 2017 · US
Substrate transfer robot with chamber and substrate monitoring capability
US-9691650-B2 · Jun 27, 2017 · US
Method and apparatus for sealing an opening of a processing chamber
US-9458538-B2 · Oct 4, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Vertical inline CVD system
US-9922854-B2 · Mar 20, 2018 · US
Anodized showerhead
US-9758869-B2 · Sep 12, 2017 · US
Substrate transfer robot with chamber and substrate monitoring capability
US-9691650-B2 · Jun 27, 2017 · US
Method and apparatus for sealing an opening of a processing chamber
US-9458538-B2 · Oct 4, 2016 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32091 | 3 |
| C23C16/5096 | 3 |
| C23C16/54 | 3 |
| H01J37/32541 | 2 |
| C23C16/45565 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 8 |
| Electricity | 8 |
| Cross-Sectional Technologies | 2 |
| Operations & Transport | 1 |