Lithographic apparatus, control system and device manufacturing method
US-9482967-B2 · Nov 1, 2016 · US
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Lallemant Nicolas Alban patents in 2016
Lallemant Nicolas Alban was listed as an assignee on 1 patent publication in 2016.
| Metric | Value |
|---|---|
| Company | Lallemant Nicolas Alban |
| Year | 2016 |
| Patents | 1 |
Patents
Representative publications for Lallemant Nicolas Alban in 2016.
Top CPC classifications
Most common classification codes for Lallemant Nicolas Alban in 2016.
| CPC | Patents |
|---|---|
| G03F7/2041 | 1 |
| G03F7/70258 | 1 |
| G03F7/70341 | 1 |
| G03F7/705 | 1 |
| G03F7/70525 | 1 |
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