NH3 containing plasma nitridation of a layer on a substrate
US-9054048-B2 · Jun 9, 2015 · US
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Olsen Christopher S patents in 2015
Olsen Christopher S was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Olsen Christopher S |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Olsen Christopher S in 2015.
Top CPC classifications
Most common classification codes for Olsen Christopher S in 2015.
| CPC | Patents |
|---|---|
| H01L21/02148 | 1 |
| H01L21/02164 | 1 |
| H01L21/02181 | 1 |
| H01L21/02332 | 1 |
| H01L21/0234 | 1 |
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