Method and apparatus for multizone plasma generation
US-9809881-B2 · Nov 7, 2017 · US
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Olsen Christopher S patents
Olsen Christopher S holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Jun 9, 2015 |
| Latest publication | Nov 7, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Multi-layer charge trap silicon nitride/oxynitride layer engineering with interface region control
US-9502521-B2 · Nov 22, 2016 · US
Post treatment methods for oxide layers on semiconductor devices
US-9431237-B2 · Aug 30, 2016 · US
NH3 containing plasma nitridation of a layer on a substrate
US-9054048-B2 · Jun 9, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and apparatus for multizone plasma generation
US-9809881-B2 · Nov 7, 2017 · US
Multi-layer charge trap silicon nitride/oxynitride layer engineering with interface region control
US-9502521-B2 · Nov 22, 2016 · US
Post treatment methods for oxide layers on semiconductor devices
US-9431237-B2 · Aug 30, 2016 · US
NH3 containing plasma nitridation of a layer on a substrate
US-9054048-B2 · Jun 9, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P14/69215 | 2 |
| H10P95/00 | 2 |
| H10P14/6532 | 2 |
| H01L21/3105 | 2 |
| H01L21/0234 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 4 |
| Chemistry & Metallurgy | 1 |