Methods for preventing plasma un-confinement events in a plasma processing chamber
US-9928995-B2 · Mar 27, 2018 · US
This page is not indexed by search engines while we improve data quality.
Fischer Andreas patents
Fischer Andreas holds 7 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 7 |
| Recent patents | 0 |
| First publication | Feb 17, 2015 |
| Latest publication | Mar 27, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Controlling ion energy distribution in plasma processing systems
US-9887069-B2 · Feb 6, 2018 · US
Method and apparatus for DC voltage control on RF-powered electrode
US-9536711-B2 · Jan 3, 2017 · US
Methods and apparatuses for effectively reducing gas residence time in a plasma processing chamber
US-9299541-B2 · Mar 29, 2016 · US
Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate
US-9251999-B2 · Feb 2, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Methods for preventing plasma un-confinement events in a plasma processing chamber
US-9928995-B2 · Mar 27, 2018 · US
Controlling ion energy distribution in plasma processing systems
US-9887069-B2 · Feb 6, 2018 · US
Method and apparatus for DC voltage control on RF-powered electrode
US-9536711-B2 · Jan 3, 2017 · US
Methods and apparatuses for effectively reducing gas residence time in a plasma processing chamber
US-9299541-B2 · Mar 29, 2016 · US
Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate
US-9251999-B2 · Feb 2, 2016 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P50/242 | 4 |
| H01J37/32091 | 4 |
| H01J37/32623 | 3 |
| H10P50/00 | 2 |
| H01J37/32174 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 7 |
| Operations & Transport | 2 |
| Chemistry & Metallurgy | 1 |
| Physics | 1 |
| Cross-Sectional Technologies | 1 |