Plasma processing apparatus and substrate processing method
US-9237638-B2 · Jan 12, 2016 · US
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Morita Osamu patents in 2016
Morita Osamu was listed as an assignee on 1 patent publication in 2016.
| Metric | Value |
|---|---|
| Company | Morita Osamu |
| Year | 2016 |
| Patents | 1 |
Patents
Representative publications for Morita Osamu in 2016.
Top CPC classifications
Most common classification codes for Morita Osamu in 2016.
| CPC | Patents |
|---|---|
| C23C16/455 | 1 |
| C23C16/511 | 1 |
| H01J37/32192 | 1 |
| H01J37/3222 | 1 |
| H01J37/32229 | 1 |
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