Lens heating compensation in photolithography
US-9235134-B2 · Jan 12, 2016 · US
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He Yuan patents
He Yuan holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Dec 15, 2015 |
| Latest publication | Jan 12, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Methods of forming patterns for semiconductor device structures
US-9213239-B2 · Dec 15, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Lens heating compensation in photolithography
US-9235134-B2 · Jan 12, 2016 · US
Methods of forming patterns for semiconductor device structures
US-9213239-B2 · Dec 15, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P76/204 | 1 |
| H10P50/71 | 1 |
| G03F7/2022 | 1 |
| G03F7/095 | 1 |
| G03F7/325 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 2 |
| Electricity | 1 |