Transfer chamber and method for preventing adhesion of particle
US-9385015-B2 · Jul 5, 2016 · US
This page is not indexed by search engines while we improve data quality.
Yamawaku Jun patents
Yamawaku Jun holds 7 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 7 |
| Recent patents | 0 |
| First publication | Feb 24, 2015 |
| Latest publication | Jul 5, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Substrate processing apparatus
US-9349618-B2 · May 24, 2016 · US
Plasma processing apparatus and plasma processing method
US-9313872-B2 · Apr 12, 2016 · US
Plasma processing apparatus and plasma processing method
US-9253867-B2 · Feb 2, 2016 · US
Plasma processing apparatus
US-9236226-B2 · Jan 12, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Transfer chamber and method for preventing adhesion of particle
US-9385015-B2 · Jul 5, 2016 · US
Substrate processing apparatus
US-9349618-B2 · May 24, 2016 · US
Plasma processing apparatus and plasma processing method
US-9313872-B2 · Apr 12, 2016 · US
Plasma processing apparatus and plasma processing method
US-9253867-B2 · Feb 2, 2016 · US
Plasma processing apparatus
US-9236226-B2 · Jan 12, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 7 |
| Chemistry & Metallurgy | 1 |
| Physics | 1 |