Temperature control system including sub-chiller
US-9019505-B2 · Apr 28, 2015 · US
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Yamawaku Jun patents in 2015
Yamawaku Jun was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Yamawaku Jun |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Yamawaku Jun in 2015.
Substrate removing method and storage medium
US-8964350-B2 · Feb 24, 2015 · US
Top CPC classifications
Most common classification codes for Yamawaku Jun in 2015.
| CPC | Patents |
|---|---|
| G01J2005/583 | 1 |
| G01J9/02 | 1 |
| H01L21/67248 | 1 |
| H01L21/6833 | 1 |
| H10P72/0602 | 1 |
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