Apparatus for variable substrate temperature control
US-9783889-B2 · Oct 10, 2017 · US
Yuan Xiaoxiong was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Yuan Xiaoxiong |
| Year | 2017 |
| Patents | 1 |
Representative publications for Yuan Xiaoxiong in 2017.
US-9783889-B2 · Oct 10, 2017 · US
Most common classification codes for Yuan Xiaoxiong in 2017.
| CPC | Patents |
|---|---|
| C23C16/45565 | 1 |
| C23C16/4583 | 1 |
| C23C16/4585 | 1 |
| C23C16/4586 | 1 |
| C23C16/46 | 1 |
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