Deposition ring for physical vapor deposition chamber
US-D888903-S · Jun 30, 2020 · US
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Deposition ring of a process kit for semiconductor substrate processing
USD1069863S · US · S1
| Field | Value |
|---|---|
| Publication number | US-D1069863-S |
| Application number | US-202229848746-F |
| Country | US |
| Kind code | S1 |
| Filing date | Aug 4, 2022 |
| Priority date | Aug 4, 2022 |
| Publication date | Apr 8, 2025 |
| Grant date | Apr 8, 2025 |
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CLAIM The ornamental design for a deposition ring of a process kit for semiconductor substrate processing, as shown and described.
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