In situ plasma clean for removal of residue from pedestal surface without breaking vacuum

Patent metadata

Field	Value
Publication number	US-9818585-B2
Application number	US-201414280201-A
Country	US
Kind code	B2
Filing date	May 16, 2014
Priority date	Feb 27, 2009
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

Methods and apparatus for in-situ plasma cleaning of a deposition chamber are provided. In one embodiment a method for plasma cleaning a deposition chamber without breaking vacuum is provided. The method comprises positioning a substrate on a susceptor disposed in the chamber and circumscribed by an electrically floating deposition ring, depositing a metal film on the substrate and the deposition ring in the chamber, grounding the metal film deposited on the deposition ring without breaking vacuum, and removing contaminants from the chamber with a plasma formed in the chamber without resputtering the metal film on the grounded deposition ring and without breaking vacuum.

First claim

The invention claimed is:

1. A physical vapor deposition (PVD) chamber, comprising:
a chamber body having a chamber bottom and chamber walls;
a sputtering target for depositing sputtered material onto a substrate;
a susceptor disposed generally parallel to and opposite the sputtering target for supporting the substrate, wherein the susceptor is movable between a processing position and a cleaning position;
an electrically floating deposition ring positioned on the susceptor and encircling a peripheral wall of the susceptor, wherein the deposition ring is isolated from the chamber body;
a grounded lift-pin plate positioned below the susceptor;
a metallic connecting strap coupled to the deposition ring for electrically coupling metallic films deposited on the deposition ring with the grounded lift-pin plate; and
a grounding loop electrically coupled with the metallic connecting strap, the grounding loop contacting the grounded lift-pin plate when the susceptor is in the cleaning position and spaced from the grounded lift-pin plate when the susceptor is in the processing position.

2. The chamber of claim 1 , further comprising:
a heat shield positioned between the susceptor and the grounded lift-pin plate; and
a mounting bracket coupled to the heat shield, wherein the metallic connecting strap is coupled to a first end of the mounting bracket and the grounding loop is coupled to a second end of the mounting bracket.

3. The chamber of claim 2 , further comprising ceramic washers electrically isolating the mounting bracket from the heat shield.

4. The chamber of claim 2 , further comprising:
a gas supply for introducing a gas into the chamber; and
a gas exhaust for exhausting gas from the chamber.

5. The chamber of claim 1 , wherein the electrically floating deposition ring has a boss extending from a top surface and the metallic connecting strap has a hole for accepting the boss, wherein an end of the metallic connecting strap is exposed on top of the deposition ring radially inward of the boss.

6. The chamber of claim 1 , wherein the deposition ring comprises:
an annular disk surrounding the susceptor;
an inner lip extending transversely to the annular disk and defining an inner perimeter of the deposition ring; and
an outer lip, wherein a radial groove is located between the inner lip and the outer lip, and the outer lip extends from an outer edge of the deposition ring to the radial groove.

7. The chamber of claim 5 , wherein the deposition ring has a notch including the boss, wherein the notch is configured to accommodate the metallic connecting strap.

8. The chamber of claim 7 , wherein the notch is formed in the outer lip and extends from the outer lip inward toward the radial groove.

9. The chamber of claim 1 , wherein the deposition ring is fabricated from ceramic material.

10. The chamber of claim 1 , wherein the metallic connecting strap comprises:
a first end;
a second end;
a first bend positioned adjacent to the first end; and
a second bend positioned adjacent to the second end, wherein the metallic connection strap has a first hole positioned between the first end and the first bend for accommodating the boss of the deposition ring and a second hole positioned between the second bend and the second end.

11. A physical vapor deposition (PVD) chamber, comprising:
a chamber body having a chamber bottom and chamber walls;
a sputtering target for depositing sputtered material onto a substrate;
a susceptor disposed generally parallel to and opposite the sputtering target for supporting the substrate, wherein the susceptor is movable between a processing position and a cleaning position;
an electrically floating ceramic deposition ring positioned on the susceptor and encircling a peripheral wall of the susceptor, wherein the ceramic deposition ring is isolated from the chamber body and comprises:
an annular disk surrounding the susceptor;
an inner lip extending transversely to the annular disk and defining an inner perimeter of the ceramic deposition ring; and
an outer lip, wherein a radial groove is located between the inner lip and the outer lip, and the outer lip extends from an outer edge of the ceramic deposition ring to the radial groove;

a grounded lift-pin plate positioned below the susceptor;
a metallic connecting strap coupled to the ceramic deposition ring for electrically coupling metallic films deposited on the ceramic deposition ring with the grounded lift-pin plate; and
a grounding loop electrically coupled with the metallic connecting strap, the grounding loop contacting the grounded lift-pin plate when the susceptor is in the cleaning position and spaced from the grounded lift-pin plate when the susceptor is in the processing position.

12. The chamber of claim 11 , further comprising:
a heat shield positioned between the susceptor and the grounded lift-pin plate; and
a mounting bracket coupled to the heat shield, wherein the metallic connecting strap is coupled to a first end of the mounting bracket and the grounding loop is coupled to a second end of the mounting bracket.

13. The chamber of claim 12 , further comprising ceramic washers electrically isolating the mounting bracket from the heat shield.

14. The chamber of claim 12 , further comprising:
a gas supply for introducing a gas into the chamber; and
a gas exhaust for exhausting gas from the chamber.

15. The chamber of claim 11 , wherein the electrically floating ceramic deposition ring has a boss extending from a top surface of the annular disk and the metallic connecting strap has a hole for accepting the boss, wherein an end of the strap is exposed on top of the ceramic deposition ring radially inward of the boss.

16. The chamber of claim 15 , wherein the ceramic deposition ring has a notch including the boss, wherein the notch is configured to accommodate the metallic connecting strap.

17. The chamber of claim 16 , wherein the notch is formed in the outer lip and extends from the outer lip inward toward the radial groove.

18. The chamber of claim 11 , wherein the metallic connecting strap comprises:
a first end;
a second end;
a first bend positioned adjacent to the first end; and
a second bend positioned adjacent to the second end, wherein the metallic connection strap has a first hole positioned between the first end and the first bend for accommodating the boss of the ceramic deposition ring and a second hole positioned between the second bend and the second end.

19. The chamber of claim 11 , further comprising a shield encircling the sputtering target and shadowing the chamber walls.

20. The chamber of claim 1 , further comprising a shield encircling the sputtering target and shadowing the chamber walls.

Assignees

• Applied Materials Inc

Inventors

• Green Richard J
• Tsai Cheng-Hsiung
• Roy Shambhu N
• Bajaj Puneet
• Loo David H

Classifications

• C23C14/564

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title

• C23C14/50

  Substrate holders · CPC title

• H01J37/3408

  Planar magnetron sputtering · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32715

  Workpiece holder · CPC title