Wafer cooling apparatus and method

Patent metadata

Field	Value
Publication number	US-9978599-B2
Application number	US-201715609273-A
Country	US
Kind code	B2
Filing date	May 31, 2017
Priority date	Jun 2, 2016
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

An ion implantation system has a first chamber and a process chamber with a heated chuck. A controller transfers the workpiece between the heated chuck and first chamber and selectively energizes the heated chuck first and second modes. In the first and second modes, the heated chuck is heated to a first and second temperature, respectively. The first temperature is predetermined. The second temperature is variable, whereby the controller determines the second temperature based on a thermal budget, an implant energy, and/or an initial temperature of the workpiece in the first chamber, and generally maintains the second temperature in the second mode. Transferring the workpiece from the heated chuck to the first chamber removes implant energy from the process chamber in the second mode. Heat may be further transferred from the heated chuck to a cooling platen by a transfer of the workpiece therebetween to sequentially cool the heated chuck.

First claim

What is claimed is:

1. An ion implantation system, comprising:
an ion implantation apparatus configured to direct an ion beam toward a process chamber;
a first chamber operably coupled to the process chamber;
a heated chuck positioned within the process chamber, wherein the heated chuck is configured to selectively clamp a workpiece to a clamping surface thereof;
a heating apparatus configured to selectively heat the clamping surface of the heated chuck;
a workpiece transfer apparatus configured to transfer the workpiece between the heated chuck and the first chamber; and
a controller configured to selectively transfer the workpiece between the heated chuck and the first chamber via the workpiece transfer apparatus, and wherein the controller is configured to selectively energize the heating apparatus to operate the heated chuck in each of a first mode and a second mode, wherein in the first mode, the heating apparatus heats the clamping surface to a first temperature, and wherein in the second mode, the heating apparatus heats the clamping surface to a second temperature, and wherein the first temperature is predetermined and associated with a high temperature ion implantation, and wherein the second temperature is associated with a quasi-room temperature ion implantation, wherein the controller is configured to determine the second temperature based on one or more of a thermal budget associated with the workpiece, an implant energy associated with the ion beam impacting the workpiece, and an initial temperature of the workpiece when the workpiece resides in the first chamber, wherein the controller is configured to generally maintain the second temperature on the heated chuck in the second mode, and wherein transferring the workpiece from the heated chuck to the first chamber generally removes the implant energy from the process chamber when the heated chuck is operated in the second mode, wherein the first temperature is greater than approximately 300° C. and wherein the second temperature is less than approximately 100° C.

2. The ion implantation system of claim 1 , wherein the first temperature is approximately in the range of 300° C. to 600° C., and wherein the second temperature is approximately in the range of 20° C. to 100° C.

3. The ion implantation system of claim 1 , wherein the heating apparatus heats comprises one or more heaters associated with the clamping surface of the heated chuck.

4. The ion implantation system of claim 3 , wherein the one or more heaters comprise one or more resistive heaters embedded within the heated chuck.

5. The ion implantation system of claim 1 , wherein the heating apparatus comprises a radiant heat source configured to selective heat the clamping surface of the heated chuck.

6. The ion implantation system of claim 5 , wherein the radiant heat source comprises one or more of a halogen lamp, light emitting diode, and infrared thermal device.

7. The ion implantation system of claim 1 , wherein the controller is configured to determine the second temperature based on all of the thermal budget associated with the workpiece, implant energy associated with the ion beam impacting the workpiece, and the initial temperature of the workpiece when the workpiece resides in the first chamber.

8. The ion implantation system of claim 1 , further comprising a cooling platen configured to support and cool the workpiece.

9. The ion implantation system of claim 8 , wherein the controller is further configured to transfer the workpiece between the heated chuck and the cooling platen without implanting ions into the workpiece via a control of the workpiece transfer apparatus, whereby the workpiece transfers heat from the heated chuck to the cooling platen, thereby cooling the heated chuck to a cool temperature associated with the second temperature.

10. A method for maintaining temperature consistency in an ion implantation system, the method comprising:
determining an operation of a heated chuck as being in one of a first mode and a second mode, wherein the first mode is associated with a high temperature ion implantation into a workpiece at a first temperature, wherein the first temperature is predetermined, and wherein the second mode is associated with a quasi-room temperature ion implantation into the workpiece at a second temperature;
determining the second temperature based on one or more of a thermal budget associated with the workpiece, an implant energy associated an the ion beam impacting the workpiece, and an initial temperature of the workpiece when the workpiece resides in a first chamber;
heating the heated chuck to the first temperature when the ion implantation system is in the first mode;
heating the heated chuck to the second temperature when the operation of the ion implantation system is in the second mode;
transferring the workpiece from the first chamber to the heated chuck;
implanting ions into the workpiece on the heated chuck; and
transferring the workpiece from the heated chuck to the first chamber, therein generally removing implant energy associated with the implantation of ions into the workpiece from the heated chuck when the heated chuck is operated in the second mode, wherein the first temperature is greater than approximately 300° C. and wherein the second temperature is less than approximately 100° C.

11. The method of claim 10 , further comprising:
operating the heated chuck in the first mode; and
changing the operation of the heated chuck from the first mode to the second mode, wherein changing the operation of the heated chuck from the first mode to the second mode further comprises:
providing a cooling platen at a cool temperature associated with the second temperature; and
cycling one or more workpieces between the heated chuck and the cooling platen without implanting ions into the one or more workpieces, whereby the one or more workpieces transfer heat from the heated chuck to the cooling platen, thereby cooling the heated chuck.

12. The method of claim 10 , wherein heating the heated chuck comprises selectively energizing one or more heaters embedded within the heated chuck.

13. The method of claim 10 , wherein heating the heated chuck comprises radiantly heating a clamping surface of the heated chuck.

14. The method of claim 13 , wherein radiantly heating the clamping surface of the heated chuck comprises directing one or more of a halogen lamp, light emitting diode, and infrared thermal device toward a clamping surface.

15. An ion implantation system, comprising:
an ion implantation apparatus configured to direct an ion beam toward a process chamber;
a first chamber operably coupled to the process chamber;
a heated chuck positioned within the process chamber, wherein the heated chuck is configured to selectively clamp a workpiece to a clamping surface thereof, wherein the heated chuck comprises a heating apparatus configured to selectively heat the clamping surface of the heated chuck;
a workpiece transfer apparatus configured to transfer the workpiece between the heated chuck and the first chamber; and
a controller configured to selectively transfer the workpiece between the heated chuck and the first chamber via the workpiece transfer apparatus, and wherein the controller is configured to selectively energize the heating apparatus to operate the heated chuck in each of a first mode and a second mode, wherein in the first mode, the heating apparatus heats the clamping surface to a first temperature, and wherein in the second mode, the heating apparatus heats the clamping surface to a second temperature, and wherein the first temperatu

Assignees

• Axcelis Tech Inc

Inventors

• Farley Marvin
• Ameen Mike
• Jen Causon Ko-Chuan

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0471

  comprising at least one ion or electron beam chamber · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title