Backside sensing bioFET with enhanced performance
US-9389199-B2 · Jul 12, 2016 · US
US9970984B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9970984-B2 |
| Application number | US-201213690959-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 30, 2012 |
| Priority date | Dec 1, 2011 |
| Publication date | May 15, 2018 |
| Grant date | May 15, 2018 |
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In one implementation, a method for operating an apparatus is described. The method includes applying a bias voltage to place a transistor of a reference sensor in a known state. The reference sensor is in an array of sensors that further includes a chemical sensor coupled to a reaction region for receiving at least one reactant. The method further includes acquiring an output signal from the reference sensor in response to the applied bias voltage. The method further includes determining a defect associated with the array if the output signal does not correspond to the known state.
Opening claim text (preview).
What is claimed is: 1. An apparatus, comprising: an array of sensors including a chemical sensor coupled to a reaction region for receiving at least one reactant, the chemical sensor including a chemically-sensitive transistor, a first terminal of the chemically-sensitive transistor directly coupled to a first row select transistor to bias the chemically sensitive transistor, and the first terminal of the chemically-sensitive transistor directly coupled to a first terminal of a second row select transistor to couple the first terminal of the chemically-sensitive transistor to a column line, and a reference sensor including a reference transistor having a gate terminal coupled to a reference node, and a first terminal directly coupled to a third row select transistor to bias the reference transistor and directly coupled to a fourth row select transistor to couple the first terminal of the reference transistor to the column line, the reference transistor having a second terminal coupled to a second terminal of the second row select transistor; and a controller to apply a bias voltage to the reference node to place the reference transistor in a known state, acquire an output signal from the reference sensor in response to the applied bias voltage, and determine a defect associated with the array if the output signal does not correspond to the known state. 2. The apparatus of claim 1 , wherein the bias voltage is sufficient to place the transistor in one of an on state or an off state. 3. The apparatus of claim 1 , wherein the chemical sensor generates a sensor signal in response to a chemical reaction occurring within the reaction region. 4. The apparatus of claim 3 , wherein the chemical reaction is a sequencing reaction. 5. The apparatus of claim 1 , wherein the chemical sensor and the reference sensor share an access circuit coupled to the array, and the determination comprises determining that the shared access circuit is defective if the output signal does not correspond to the known state.
Systems (G01N27/27 takes precedence) · CPC title
Testing of integrated circuits [IC] (G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801) · CPC title
for testing field effect transistors, i.e. FET's · CPC title
specially adapted for biomolecules, e.g. gate electrode with immobilised receptors · CPC title
Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS · CPC title
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