Ternary tungsten boride nitride films and methods for forming same

Patent metadata

Field	Value
Publication number	US-9969622-B2
Application number	US-201313949092-A
Country	US
Kind code	B2
Filing date	Jul 23, 2013
Priority date	Jul 26, 2012
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

Ternary tungsten boride nitride (WBN) thin films and related methods of formation are provided. The films are have excellent thermal stability, tunable resistivity and good adhesion to oxides. Methods of forming the films can involve thermal atomic layer deposition (ALD) processes in which boron-containing, nitrogen-containing and tungsten-containing reactants are sequentially pulsed into a reaction chamber to deposit the WBN films. In some embodiments, the processes include multiple cycles of boron-containing, nitrogen-containing and tungsten-containing reactant pulses, with each cycle including multiple boron-containing pulses.

First claim

The invention claimed is:

1. A method comprising:
performing multiple cycles of sequentially introducing pulses of a boron-containing reactant, a nitrogen-containing reactant and a tungsten-containing reactant into a reaction chamber containing a semiconductor substrate to thereby deposit a ternary tungsten boride nitride film on the substrate, wherein the ternary tungsten boride nitride film contains tungsten-boron bonds and tungsten-nitrogen bonds, wherein a ratio of the number of boron-containing reactant pulses to the number of tungsten-containing reactant pulses introduced during the multiple cycles is at least three, and wherein the boron-containing reactant reduces the tungsten-containing reactant to form tungsten and provides boron to form the ternary tungsten boride nitride film.

2. The method of claim 1 , wherein each cycle comprises multiple sequential sub-cycles of alternating boron-containing reactant and nitrogen-containing reactant pulses without any intervening tungsten-containing reactant pulses.

3. The method of claim 1 , wherein each cycle comprises multiple sequential boron-containing reactant pulses without any intervening nitrogen-containing reactant pulses or tungsten-containing reactant pulses.

4. The method of claim 1 , wherein the substrate is exposed to a boron-containing pulse prior to being exposed to any tungsten-containing reactant pulses.

5. The method of claim 1 , wherein the substrate is exposed to a tungsten-containing reactant pulses prior to being exposed to any boron-containing reactant pulses and nitrogen-containing reactant pulses.

6. The method of claim 1 , wherein the ternary tungsten boride nitride film is deposited on an oxide.

7. The method of claim 1 , wherein each cycle includes a purge gas pulse between any two sequential boron-containing reactant pulses.

8. The method of claim 7 , wherein a boron-containing reactant pulse has a first duration and a purge gas pulse that directly follows the boron-containing reactant pulses has a second duration, and the ratio of the second duration to the first duration is at least about 5.

9. The method of claim 8 , wherein the ratio is at least about 10.

10. The method of claim 1 , wherein the atomic percent of tungsten in the ternary tungsten boride nitride film is between about 5% and 70%, wherein the atomic percent of boron in the ternary tungsten boride nitride film is between about 5% and 60%, and the atomic percentage of nitrogen in the ternary tungsten boride nitride film is between about 20% and 80%.

11. The method of claim 1 , further comprising annealing the ternary tungsten boride nitride film at a temperature of at least about to 750° C.

12. The method of claim 1 , further comprising depositing a tungsten nucleation layer on the ternary tungsten boride nitride film.

13. The method of claim 12 , wherein the tungsten nucleation layer is deposited by introducing alternating boron-containing reactant pulses and tungsten-containing reactant pulses to a chamber containing the substrate.

14. The method of claim 13 , wherein the tungsten nucleation layer is deposited at a temperature between about 250° C. and 350° C.

15. The method of claim 1 , wherein the ternary tungsten boride nitride film is amorphous.

Assignees

• Lam Res Corp

Inventors

• Lei Wei
• Gao Juwen

Classifications

• H10P14/432

  using selective deposition · CPC title

• H10W20/425

  Barrier, adhesion or liner layers · CPC title

• H10W20/045

  for deposition from the gaseous phase, e.g. for chemical vapour deposition [CVD] · CPC title

• H10W20/42

  Vias, e.g. via plugs · CPC title

• H10W20/033

  in openings in dielectrics · CPC title