Methods of treating nitride films

Patent metadata

Field	Value
Publication number	US-9966275-B2
Application number	US-201615381779-A
Country	US
Kind code	B2
Filing date	Dec 16, 2016
Priority date	Dec 17, 2015
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

Methods for reducing oxygen content in an oxidized annealed metal nitride film comprising exposing the film to a plasma.

First claim

What is claimed is:

1. A method comprising exposing an annealed metal nitride film having an oxygen content to a plasma at a temperature in the range of about 200° C. to about 450° C. to reduce the oxygen content of the metal nitride film.

2. The method of claim 1 , wherein the metal nitride film comprises one or more of titanium, tantalum and tungsten.

3. The method of claim 2 , wherein the metal nitride film comprises a metal silicide nitride.

4. The method of claim 1 , wherein the metal nitride film has an oxygen content greater than or equal to about 7 atomic %.

5. The method of claim 4 , wherein exposure to the plasma reduces the oxygen content to less than or equal to about 5.5 atomic %.

6. The method of claim 1 , wherein the plasma comprises one or more of N 2 , H 2 or NH 3 .

7. The method of claim 6 , wherein the plasma is substantially pure.

8. The method of claim 1 , further comprising depositing a Co film on top of the metal nitride film after exposure to the plasma.

9. The method of claim 1 , wherein the plasma is generated with a bias power and a coil power.

10. The method of claim 9 , wherein the bias power is in the range of about 1 watt to about 300 watts.

11. The method of claim 9 , wherein the coil power is in the range of about 300 watts to about 1500 watts.

12. The method of claim 1 , wherein exposure to the plasma occurs at a pressure in the range of about 1 mTorr to about 100 mTorr.

13. The method of claim 1 , wherein exposure to the plasma occurs for a time in the range of about 15 seconds to about 90 seconds.

14. A method comprising:
annealing a substrate having a metal nitride film thereon at a temperature in the range of about 500° C. to about 600° C.;
allowing the metal nitride film to become oxidized to have an oxygen content greater than or equal to about 7 atomic %; and
exposing the oxidized metal nitride film to a plasma comprising one or more of N 2 , H 2 or NH 3 to reduce the oxygen content to less than or equal to about 5.5 atomic %.

15. The method of claim 14 , wherein annealing the film forms a metal silicide nitride film.

16. The method of claim 14 , further comprising forming a cobalt film on the metal nitride film after exposure to the plasma.

17. The method of claim 14 , wherein the metal nitride film comprises one or more of Ta, Ti or W.

18. The method of claim 14 , wherein the plasma is substantially pure.

19. A method comprising:
providing a silicon substrate with a metal nitride thereon, the metal nitride comprising one or more of tantalum, titanium or tungsten;
annealing the substrate at a temperature in the range of about 500° C. to about 600° C. to create a metal silicide nitride film;
allowing the metal silicide nitride film to oxidize to form an oxidized annealed metal silicide nitride film, the oxidized annealed metal silicide nitride film having an oxygen content greater than or equal to about 8 atomic %;
exposing the oxidized annealed metal silicide nitride film to a plasma comprising one or more of N 2 , H 2 or NH 3 to form a treated metal silicide nitride film with an oxygen content less than or equal to about 5.5 atomic %; and
forming a cobalt film on the treated metal silicide nitride film.

Assignees

• Applied Materials Inc

Inventors

• Biggs Brent
• Gelatos Avgerinos V
• KURATOMI Takashi
• Lee Mark H

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10D64/0112 Primary

  using conductive layers comprising silicides · CPC title

• H10W20/0523

  by irradiating with ultraviolet or particle radiation · CPC title

• H10P14/414 Primary

  of metal-silicide materials · CPC title

• H01L21/32053 Primary

  Electricity · mapped topic