Molybdenum containing targets
US-2015332903-A1 · Nov 19, 2015 · US
Methods and apparatus for nodule control in a titanium-tungsten target
US9960023B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9960023-B2 |
| Application number | US-201414587967-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 31, 2014 |
| Priority date | Dec 31, 2014 |
| Publication date | May 1, 2018 |
| Grant date | May 1, 2018 |
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Abstract
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Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.
First claim
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The invention claimed is: 1. A target, comprising: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than a grain size of a predominant quantity of the tungsten powder. 2. The target of claim 1 , wherein target comprises a source material consisting essentially of titanium (Ti) and tungsten (W). 3. The target of claim 1 , wherein the grain size of substantially all of the titanium powder is less than or equal to the grain size of substantially all of the tungsten powder. 4. The target of claim 1 , wherein the target comprises about 90 weight percent tungsten (W) and about 10 weight percent titanium (Ti). 5. The target of claim 1 , wherein the target further comprises a density of at least about 98 percent. 6. The target of claim 1 , wherein an average grain size of the titanium powder is less than about 20 μm. 7. The target of claim 6 , wherein an average grain size of the tungsten powder is about 20 μm to about 45 μm. 8. The target of claim 1 , wherein an average grain size of the titanium powder and an average grain size of the tungsten powder are each about 20 μm to about 30 μm. 9. The target of claim 1 , wherein after forming the target, the target has an average titanium-tungsten grain size of about 60 μm. 10. A target, comprising: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder, wherein an average grain size of the tungsten powder is about 20 μm to about 45 μm, and wherein after forming the target, the target has an average titanium-tungsten grain size of about 60 μm. 11. The target of claim 10 , wherein an average grain size of the titanium powder is less than about 20 μm. 12. The target of claim 10 , wherein an average grain size of the titanium powder and an average grain size of the tungsten powder are each about 20 μm to about 30 μm. 13. The target of claim 10 , wherein target comprises a source material consisting essentially of titanium (Ti) and tungsten (W). 14. The target of claim 10 , wherein the grain size of substantially all of the titanium powder is less than or equal to the grain size of substantially all of the tungsten powder. 15. The target of claim 10 , wherein the target comprises about 90 weight percent tungsten (W) and about 10 weight percent titanium (Ti). 16. The target of claim 10 , wherein the target further has a density of at least about 98 percent.
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Classifications
Manufacturing of targets · CPC title
Alloys based on titanium · CPC title
Aspects linked to processes or compositions used in powder metallurgy · CPC title
Material · CPC title
Alloys based on tungsten or molybdenum · CPC title
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- What does patent US9960023B2 cover?
- Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or e…
- Who is the assignee on this patent?
- Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3429. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 01 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).