Apparatus for high compressive stress film deposition to improve kit life
US-10115573-B2 · Oct 30, 2018 · US
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Wei Junqi patents
Wei Junqi is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wei Junqi |
| Total patents | 4 |
| First publication | Apr 14, 2016 |
| Latest publication | Oct 30, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods and apparatus for nodule control in a titanium-tungsten target
US-9960023-B2 · May 1, 2018 · US
Methods and apparatus for nodule control in a titanium-tungsten target
US-2016189941-A1 · Jun 30, 2016 · US
Apparatus for high compressive stress film deposition to improve kit life
US-2016104603-A1 · Apr 14, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32477 | 2 |
| H01J37/3288 | 2 |
| H01J37/32642 | 2 |
| H01J37/32623 | 2 |
| H01J37/3491 | 2 |