Chamber for patterning non-volatile metals

Patent metadata

Field	Value
Publication number	US-9953843-B2
Application number	US-201615017444-A
Country	US
Kind code	B2
Filing date	Feb 5, 2016
Priority date	Feb 5, 2016
Publication date	Apr 24, 2018
Grant date	Apr 24, 2018

Abstract

Apparatuses suitable for etching substrates at various pressure regimes are described herein. Apparatuses include a process chamber including a movable pedestal capable of being positioned at a raised position or a lowered position, showerhead, and optional plasma generator. Apparatuses may be suitable for etching non-volatile metals using a treatment while the movable pedestal is in the lowered position and a high pressure exposure to organic vapor while the movable pedestal is in the raised position.

First claim

What is claimed is:

1. A method of etching non-volatile metal on a substrate in a process chamber comprising a showerhead and a movable pedestal for holding the substrate, the movable pedestal capable of being positioned in a raised position or a lowered position such that the movable pedestal in the raised position forms an upper chamber region between the movable pedestal and the showerhead and a lower chamber region beneath the movable pedestal, the method comprising:
exposing the non-volatile metal on the substrate to a plasma when the movable pedestal is in the lowered position to modify the non-volatile metal and form a modified non-volatile metal; and
exposing the modified non-volatile metal to an organic vapor when the movable pedestal is in the raised position to remove the modified non-volatile metal,
wherein a pressure differential is formed in the process chamber between the upper chamber region and the lower chamber region when the movable pedestal is in the raised position.

2. The method of claim 1 , wherein pressure of the upper chamber region when the movable pedestal is in the raised position is at least about 2 to about 10,000 times greater than pressure of the lower chamber region when the movable pedestal is in the lowered position.

3. The method of claim 1 , further comprising moving the movable pedestal to the raised position to a position wherein a distance between the showerhead and the movable pedestal in the upper chamber region is between about 1 mm and about 2 mm.

4. The method of claim 1 , wherein the pressure differential formed between the upper chamber region and the lower chamber region when the movable pedestal is in the raised position is between about 50 mTorr and about 5 Torr.

5. The method of claim 1 , wherein the movable pedestal is capable of moving a distance between about 4 inches and about 6 inches between the lowered position and the raised position.

6. The method of claim 1 , wherein the organic vapor is delivered to the process chamber during the exposing of the modified non-volatile metal to the organic vapor at a flow rate greater than about 1000 sccm.

7. The method of claim 1 , wherein a surface of an edge of the movable pedestal is perpendicular to a surface of the movable pedestal.

8. The method of claim 1 , wherein a surface of an edge of the movable pedestal is slanted.

9. The method of claim 1 , wherein exposing the non-volatile metal to the plasma comprises introducing a chlorine-containing or oxygen-containing process gas to the showerhead to generate the plasma.

10. The method of claim 1 , wherein the thickness of the movable pedestal is between about 50 mm and about 100 mm.

11. The method of claim 1 , wherein the movable pedestal comprises an annular raised region adjacent to an edge of the movable pedestal.

12. The method of claim 11 , wherein the annular raised region adjacent to the edge of the movable pedestal is capable of enclosing the upper chamber region when the movable pedestal is in the raised position.

13. The method of claim 1 , wherein the process chamber further comprises a slanted region adjacent to the showerhead and the movable pedestal comprises a slanted edge, wherein interfacing surfaces of the slanted region adjacent to the showerhead and the slanted edge of the movable pedestal are parallel.

14. The method of claim 13 , wherein a distance from an inner corner of a slanted region to an outer corner of the slanted region is between about 50 mm and about 200 mm.

15. The method of claim 13 , further comprising moving the movable pedestal to the raised position such that an interface of the slanted edge of the movable pedestal and an interface of the slanted region adjacent to the showerhead contact each other to form an enclosed upper chamber region.

16. The method of claim 13 , wherein the slanted region adjacent to the showerhead and the process chamber are part of one monolithic structure.

17. The method of claim 13 , wherein moving the movable pedestal to the raised position adjusts the size of an adjustable gap between the slanted edge of the movable pedestal and the slanted region adjacent to the showerhead.

18. The method of claim 17 , wherein the size of the adjustable gap between the slanted edge of the movable pedestal and the slanted region adjacent to the showerhead is between about 0.3 mm and about 3 mm.

19. An apparatus for processing a semiconductor substrate, the apparatus comprising:
a process chamber comprising:
a showerhead for distributing process gases to the apparatus,
a movable pedestal for holding the semiconductor substrate, the movable pedestal comprising a slanted edge and being capable of being positioned in a raised or a lowered position such that the movable pedestal in the raised position forms an upper chamber region between the movable pedestal and the showerhead and a lower chamber region beneath the movable pedestal, and
a slanted region adjacent to the showerhead capable of aligning with and contacting the slanted edge of the movable pedestal when the movable pedestal is moved to the raised position to form an adjustable gap between the slanted edge of the movable pedestal and the slanted region adjacent to the showerhead;

inlets coupled to the showerhead for delivering process gases toward the showerhead;
a plasma generator for igniting a plasma in the process chamber; and
a controller for controlling operations of the apparatus, the controller comprising machine-readable instructions for moving the movable pedestal to the raised position or lowered position,
wherein a pressure differential is formed between the upper chamber region and the lower chamber region by varying the adjustable gap between the slanted edge of the movable pedestal and the slanted region adjacent to the showerhead when the movable pedestal is in the raised position, and
wherein a distance from an inner corner of the slanted region to an outer corner of the slanted region is between about 50 mm and about 200 mm.

20. The apparatus of claim 19 , wherein the slanted region adjacent to the showerhead and the process chamber are one monolithic structure.

21. The apparatus of claim 19 , wherein the movable pedestal comprises an annular raised region adjacent to the slanted edge of the movable pedestal.

Assignees

• Lam Res Corp

Inventors

• Shen Meihua
• Huang Shuogang
• Lill Thorsten
• Panagopoulos Theo

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P50/269

  pre- or post-treatments, e.g. anti-corrosion processes · CPC title

• H10P50/266

  by vapour etching only · CPC title