Reticle pod with cover to baseplate alignment system

Patent metadata

Field	Value
Publication number	US-9919863-B2
Application number	US-201314437121-A
Country	US
Kind code	B2
Filing date	Oct 17, 2013
Priority date	Oct 19, 2012
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

An alignment system for aligning the cover and base of an inner pod of a reticle carrier. The cover and base can each be provided with hard planar surface seal zones on the bottom surface and the top surface, respectively. The cover of the inner pod may be provided with a through hole or a blind hole into which an alignment pin is disposed. The base is provided with a guide recess to receive the distal end of the alignment pin. The alignment pin operates to limit contact surface area between the cover and the base during that is in sliding contact, thus inhibiting particulate generation. Low particulate-generating materials, such as stainless steel or polyamide-imide, can also be utilized to further reduce particulate generation. Furthermore, the cover and base can each be unitary without need for fastening components thereto, thereby eliminating clamped surfaces that can entrap and subsequently shed particulates.

First claim

What is claimed is:

1. A reticle carrier for containment of a reticle, comprising:
an outer pod assembly including an upper portion and a lower portion that cooperate to define an enclosure; and
an inner pod assembly for storage of a reticle therein, said inner pod assembly being adapted for containment within said enclosure of said outer pod assembly, said inner pod assembly including:
a cover and a base concentric about a central axis, said central axis defining an axial direction, and
an alignment system including structure defining a hole provided in one of said cover and said base, a guide recess formed proximate an edge of the other of said cover and said base, and an alignment pin disposed in said hole;
wherein said alignment pin is disposed in said guide recess when said cover and base are engaged, said guide recess being adapted to guide said alignment pin when said cover is moved in said axial direction toward said base for alignment of said cover with said base.

2. The reticle carrier of claim 1 , wherein said hole is a through hole.

3. The reticle carrier of claim 2 , wherein said alignment pin includes a head that is positioned above said through hole.

4. The reticle carrier of claim 1 , wherein said hole is a blind hole.

5. The reticle carrier of claim 4 , further comprising structure defining a vent in fluid communication with said blind hole.

6. The reticle carrier of claim 1 , wherein a projection extends radially inward from said guide recess for contact with said alignment pin when said cover is moved axially with respect to said base.

7. The reticle carrier of claim 6 , further comprising:
a concavity provided in said guide recess; and
a ball disposed in said concavity to provide said projection.

8. The reticle carrier of claim 1 , wherein said guide recess includes a contoured wall, said contoured wall including a ridge that provides line or point contact with said alignment pin during movement of said pin in said axial direction.

9. The reticle carrier of claim 8 , wherein said contoured wall comprises:
a tapered portion immediately adjacent an interior-facing surface of the other of said cover and said base, said tapered portion defining a first radius on said interior-facing surface of the other of said cover and said base; and
a right-cylindrical portion immediately adjacent said tapered portion, said right-cylindrical portion defining a second radius that is less than said first radius,
wherein a confluence of said tapered portion and said right cylindrical portion define a ridge on said contoured wall.

10. The reticle carrier of claim 1 , wherein each of said base and said cover are metallic.

11. The reticle carrier of claim 1 , wherein said base is a unitary structure formed from a single block of material.

12. The reticle carrier of claim 11 , wherein said material is metallic.

13. The reticle carrier of claim 1 , wherein said alignment pin comprises a metal core having an upper shaft portion and a lower shaft portion, and a polymer sleeve or coating that covers at least said lower shaft portion.

14. The reticle carrier of claim 13 , wherein said polymer sleeve or coating comprises a polyamide-imide material.

15. The reticle carrier of claim 13 , wherein said lower shaft portion includes barbs that protrude radially outward therefrom for securing polymer sleeve or coating to said lower shaft portion.

16. The reticle carrier of claim 1 , wherein said alignment pin includes a stop ridge.

17. The reticle carrier of claim 1 , wherein said guide recess is a concavity formed on said edge.

18. A reticle carrier for containment of a reticle, comprising:
a pod assembly for storage of a reticle therein, said pod assembly including:
a metallic cover and a metallic base concentric about a central axis, said central axis defining an axial direction, the metallic cover and metallic base having a metal to metal flat planar cooperating sealing surfaces, and
an alignment system including structure defining a hole provided in one of said cover and said base, pin receiving structure formed proximate an edge of the other of said cover and said base, and an alignment pin disposed in said hole;
wherein said alignment pin is disposed in said pin receiving structure when said cover and base are engaged, said pin receiving structure being adapted to guide said alignment pin when said cover is moved in said axial direction toward said base for alignment of said cover with said base.

Assignees

• Entegris Inc

Inventors

• Lystad John
• Kolbow Steven P

Classifications

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1914

  characterised by locking systems · CPC title

• H10P72/1906

  specially adapted for containing masks, reticles or pellicles · CPC title

• H10P72/1902

  specially adapted for a single substrate · CPC title