Optimized spatial modeling for optical CD metrology

Patent metadata

Field	Value
Publication number	US-9915522-B1
Application number	US-201414294540-A
Country	US
Kind code	B1
Filing date	Jun 3, 2014
Priority date	Jun 3, 2013
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

Provided are scatterometry techniques for evaluating a 3D diffracting structure. In one embodiment, a method involves providing a 3D spatial model of the diffracting structure and discretizing the model into a 3D spatial mesh. The method includes approximating 3D fields for each element of the 3D mesh using 3D spatial basis functions and generating a matrix including coefficients of the 3D spatial basis functions approximating the fields. The coefficients of the 3D spatial basis functions are computed and used in computing spectral information for the model. The computed spectral information for the model is compared with measured spectral information for the diffracting structure. If the model is a good model fit, the method involves determining a physical characteristic of the diffracting structure based on the model of the diffracting structure.

First claim

What is claimed is:

1. A method of evaluating a diffracting structure utilizing an optical metrology system, the method comprising:
measuring spectral information for a diffracting structure, measuring the spectral information including illuminating the diffracting structure with an incident beam by a light source and detecting a resulting spectral signal with a detector of the optical metrology system; and
receiving and analyzing the measured signal by a processing module of the optical metrology system, including:
providing a three-dimensional (3D) spatial model of the diffracting structure in a simulation domain, the simulation domain being a spatial domain, providing the 3D spatial model including constructing a geometric model of the diffracting structure and determining how to parameterize the geometric model;
splitting the simulation domain into a plurality of subdomains;
discretizing the 3D spatial model into a 3D spatial mesh in the simulation domain;
approximating 3D fields for each element of the 3D spatial mesh using 3D spatial basis functions for each subdomain of the simulation domain;
generating a matrix comprising coefficients of the 3D spatial basis functions approximating fields in each subdomain of the simulation domain;
computing the coefficients of the 3D spatial basis functions using the matrix;
computing spectral information for the model based on the computed coefficients;
comparing the computed spectral information for the model with the measured spectral information for the diffracting structure; and
in response to a determination of a model fit by the processing module, determining a physical characteristic of the diffracting structure based on the model of the diffracting structure, the physical characteristic being a geometric or material characteristic of the diffracting structure,

wherein approximating the 3D fields for each element of the 3D spatial mesh comprises:
approximating first 3D fields for a first element of the 3D spatial mesh on one periodic boundary using one or more first spatial basis functions; and
approximating second 3D fields for a second element of the 3D spatial mesh on an opposite periodic boundary with one or more second spatial basis functions, wherein the one or more second spatial basis functions comprise the one or more first spatial basis functions multiplied by a phase shift factor, wherein the phase shift factor is a function of an angle of incident light and pitch in one or more directions of periodicity.

2. The method of claim 1 , wherein providing the 3D spatial model of the diffracting structure comprises:
determining a weak formulation of an expression of the 3D fields in a given element of the 3D spatial mesh, the weak formulation including the 3D spatial basis functions for the given element.

3. The method of claim 2 , wherein providing the 3D spatial model of the diffracting structure further comprises:
determining boundary conditions for the 3D spatial model; and
imposing the boundary conditions at periodic boundaries in strong form.

4. The method of claim 3 , wherein determining the boundary conditions for the 3D spatial model comprises:
determining the expression for the 3D fields as a function of the angle of the incident light and the pitch in one or more directions of periodicity; and
determining continuity conditions at input and output interfaces of the simulation domain.

5. The method of claim 1 , wherein providing the 3D spatial model of the diffracting structure further comprises:
determining an expression for the 3D fields wherein, in the expression, first incident fields on a first subdomain comprise fields from incident light, and second incident fields on a second subdomain comprise scattered fields from the first subdomain.

6. The method of claim 5 , wherein the expression for the 3D fields is a summation of Fourier series expansion terms of the first incident fields over a first incidence interface of the first subdomain, and the second incident fields over a second incidence interface of the second subdomain.

7. The method of claim 6 , wherein providing the 3D spatial model comprises approximating a structure in at least one subdomain as a 2D structure, and wherein approximating 2D fields in the one subdomain comprises:
expressing first 2D fields in a direction perpendicular to a plane where the 2D structure resides as scalar fields in a scalar Helmholtz equation; and
deriving second 2D fields in other directions from the first 2D fields via differentiations.

8. The method of claim 7 , wherein approximating the 2D fields in the 2D structure further comprises:
determining a weak formulation of an expression of the 2D fields, the weak formulation including 2D spatial basis functions approximating the 2D fields.

9. The method of claim 8 , wherein providing the 2D spatial model further comprises:
determining boundary conditions for the 2D spatial model; and
imposing the boundary conditions at periodic boundaries in strong form.

10. The method of claim 9 , wherein determining the boundary conditions for the 2D spatial model comprises:
determining a relationship between the 2D fields on opposite periodic boundaries, the expression comprising the scalar fields in the direction perpendicular to the plane where the 2D structure resides and a phase shift factor.

11. The method of claim 9 , wherein generating the matrix comprises:
determining, at an input port of the one subdomain, a relationship amongst the scalar fields in the direction perpendicular to the plane where the 2D structure resides;
determining a port boundary condition at the input port comprising a Fourier expansion of incident fields and reflected fields at the input port;
determining a system equation expressing the relationship amongst the scalar fields in the direction perpendicular to the plane where the 2D structure resides in matrix-vector form from testing; and
determining a matrix-vector equation that comprises total fields and the incident and the reflected fields at an incidence interface between the one subdomain and a neighboring subdomain.

12. The method of claim 9 , wherein the diffracting structure comprises films, the method further comprising:
computing Fourier components approximating incident fields onto one of the films, wherein a maximum Fourier transform wavenumber and a maximum number of Fourier modes is based on a maximum mesh size in an adjacent subdomain; and
for each of the computed Fourier components, analytically computing the scattered and transmitted fields from the one of the films.

13. The method of claim 1 , further comprising:
assigning each of the plurality of subdomains to a cell of a cell array.

14. The method of claim 13 , wherein providing the 3D spatial model of the diffracting structure comprises:
determining auxiliary surface variables, the auxiliary surface variables comprising auxiliary tangential electric fields, auxiliary tangential current density, and auxiliary electric charge density at subdomain interfaces.

15. The method of claim 14 , wherein providing the 3D spatial model of the diffracting structure further comprises:
imposing continuities across cell interfaces of the cell array using mixed second-order Robin transmission conditions.

16. The method of claim 15 , wherein imposing continuities across the subdomain interfaces using the mixed second-order Robin transmission conditions comprises:
determining field continuity at the subdomain interfaces including addressing convergence of both TE and TM evanescent modes.

17. The

Assignees

• Jiang Peilin
• Poslavsky Leonid
• Kla Tencor Corp

Inventors

• Jiang Peilin
• Poslavsky Leonid

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• G03F7/70625

  Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness · CPC title

• G01B2210/56

  Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth · CPC title

• G03F7/70616 Primary

  Monitoring the printed patterns · CPC title

• G01B11/02 Primary

  for measuring length, width or thickness (G01B11/08 takes precedence) · CPC title