Electrically conductive thin films

Patent metadata

Field	Value
Publication number	US-9899209-B2
Application number	US-201514870265-A
Country	US
Kind code	B2
Filing date	Sep 30, 2015
Priority date	Dec 8, 2014
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

An electrically conductive thin film including a plurality of nanosheets including a doped titanium oxide represented by Chemical Formula 1 and having a layered crystal structure:

(A α Ti 1−α )O 2+δ   Chemical Formula 1

wherein, in Chemical Formula 1, δ is greater than 0, A is at least one dopant metal selected from Nb, Ta, V, W, Cr, and Mo, and α is greater than 0 and less than 1. Also, an electronic device including the electrically conductive thin film.

First claim

What is claimed is:

1. An electrically conductive thin film comprising:
a plurality of nanosheets comprising a doped titanium oxide represented by Chemical Formula 1 and having a layered crystal structure such that neighboring nanosheets of the plurality of nanosheets can be slid next to each other:
(A α Ti 1−α )O 2+δ   Chemical Formula 1

wherein, in the Chemical Formula 1, δ is greater than 0, A is at least one dopant metal selected from Nb, Ta, V, W, Cr, and Mo, and α is greater than 0 and less than 1, and
wherein the doped titanium oxide represented by Chemical Formula 1 has a different crystal system than an anatase crystal system and a rutile crystal system.

2. The electrically conductive thin film of claim 1 , wherein the conductive thin film has light transmittance for light having a wavelength of 550 nanometers of greater than or equal to about 80% at a thickness of less than or equal to 10 nanometers.

3. The electrically conductive thin film of claim 1 , wherein the doped titanium oxide is represented by the formula
(A α Ti 1−α )O 2.31
wherein A is at least one dopant metal selected from Nb, Ta, V, W, Cr, and Mo, and α is greater than 0 and less than 1.

4. The electrically conductive thin film of claim 1 , wherein a content of the dopant is less than about 13 atomic percent, based on a total content of titanium.

5. The electrically conductive thin film of claim 1 , wherein the plurality of nanosheets have a longest average length of greater than or equal to 0.2 micrometers.

6. The electrically conductive thin film of claim 1 , wherein the plurality of nanosheets contact each other to provide an electrical connection.

7. An electronic device comprising the electrically conductive thin film of claim 1 .

8. The electronic device of claim 7 , wherein the electronic device is a flat panel display, a touch screen panel, a solar cell, an e-window, an electrochromic mirror, a heat mirror, a transparent transistor, or a flexible display.

9. A method of manufacturing an electrically conductive thin film, the method comprising:
providing a doped titanium dioxide including at least one dopant selected from Nb, Ta, V, W, Cr, and Mo;
mixing the doped titanium dioxide, potassium carbonate, lithium carbonate, and a molybdenum oxide flux in a selected ratio to obtain a lithium potassium titanate represented by Chemical Formula 2 and having a layered crystal structure:
K x (A α Ti 1−α ) 1.73 Li b O 4   Chemical Formula 2

wherein A is at least one dopant metal selected from Nb, Ta, V, W, Cr, and Mo, α is greater than 0 and less than 1, x is greater than 0 and less than or equal to 0.8, and b is greater than 0 and less than or equal to 0.27;
contacting the lithium potassium titanate with an acid solution to obtain an acid-exchanged titanate;
contacting the acid-exchanged titanate with an aqueous alkylammonium hydroxide solution to obtain a plurality of nanosheets comprising a doped titanium oxide represented by Chemical Formula 1 and having a layered crystal structure such that neighboring nanosheets of the plurality of nanosheets can be slid next to each other:
(A α Ti 1−α )O 2+δ   Chemical Formula 1

wherein δ is greater than 0, A is at least one dopant metal selected from Nb, Ta, V, W, Cr, and Mo, and α is greater than 0 and less than 1; and

forming a thin film including a plurality of nanosheets of the doped titanium oxide represented by Chemical Formula 1 to manufacture the electrically conductive thin film, and
wherein the doped titanium oxide represented by Chemical Formula 1 has a different crystal system than an anatase crystal system and a rutile crystal system.

10. The method of claim 9 , wherein the lithium potassium titanate has a longest diameter of greater than or equal to about 10 μm.

11. The method of claim 9 , wherein the titanium oxide is represented by (A α Ti 1-α ) 1.73 O 4 , and a content of the dopant metal is less than about 13 atomic percent, based on a total content of titanium.

12. The method of claim 9 , wherein the nanosheets have a longest average length of greater than or equal to about 0.2 micrometer.

13. The method of claim 9 , wherein the lithium potassium titanate belongs to an orthorhombic system and has the space group Cmcm.

14. The electrically conductive thin film of claim 1 , wherein the doped titanium oxide represented by Chemical Formula 1 is an ion-exchange product of a compound.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Jung Doh Won
• Park Hee Jung
• Son Yoon Chul
• Woo Yun Sung
• Lee Jongmin
• Cho Yong Hee
• Moon Kyoung Seok
• Choi Jae Young
• Lee Kimoon

Classifications

• H10P14/69398

  the material having a perovskite structure, e.g. BaTiO3 · CPC title

• H10P14/6938

  the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides · CPC title

• H10P14/69394 Primary

  the material containing titanium, e.g. TiO2 · CPC title

• H01L21/02197

  Electricity · mapped topic

• H01L21/02172

  Electricity · mapped topic