Chemical mechanical polishing apparatus and method
US-12076831-B2 · Sep 3, 2024 · US
US9895787B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9895787-B2 |
| Application number | US-201414563313-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 8, 2014 |
| Priority date | Dec 20, 2013 |
| Publication date | Feb 20, 2018 |
| Grant date | Feb 20, 2018 |
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Systems and methods are disclosed herein for adding surface features to grinding wheels. A laser may be directed substantially perpendicular to a grinding surface of a grinding wheel. The laser may be pulsed and may ablate material from the grinding surface. The laser may move relative to the grinding wheel in order to ablate shaped surface features into the grinding surface.
Opening claim text (preview).
The invention claimed is: 1. A method of dressing a grinding wheel comprising: directing a laser substantially perpendicular to a grinding surface of a multi-layer grinding wheel, the multi-layer grinding wheel comprising a matrix of abrasive particles bonded together, wherein the multi-layer grinding wheel comprises a first plurality of exposed abrasive particles; pulsing the laser; forming a triangular surface feature in the grinding surface with the laser, wherein the forming the triangular surface feature exposes a second plurality of abrasive particles; removing the triangular surface feature with the laser; and forming a crescent shaped surface feature in the grinding surface with the laser by translating the laser across a width of the grinding surface while ablating material from the grinding wheel. 2. The method of claim 1 , wherein the laser comprises at least one of a Nd:YAG laser, a CO 2 laser, and a fiber laser. 3. The method of claim 1 , further comprising translating the laser across the width of the grinding surface while forming the triangular surface feature. 4. The method of claim 1 , wherein the triangular surface feature comprises a continuous surface feature circumscribing the grinding wheel. 5. The method of claim 1 , further comprising rotating the grinding wheel as the triangular surface feature is formed. 6. The method of claim 1 , wherein the triangular surface feature is configured to enhance cooling of the grinding surface. 7. The method of claim 1 , further comprising steering the laser with a galvanometer. 8. A grinding method comprising: laser ablating a triangular surface feature in a grinding surface of a multi-layer grinding wheel, wherein the multi-layer grinding wheel comprises a first plurality of exposed abrasive particles, and wherein the laser ablating exposes a second plurality of abrasive particles; grinding a first workpiece with the multi-layer grinding wheel; laser ablating crescent shaped surface feature in the multi-layer grinding wheel; and grinding a second workpiece with the multi-layer grinding wheel. 9. The method of claim 8 , wherein the laser ablating comprises directing a pulsed laser substantially perpendicular to the grinding surface of the grinding wheel. 10. The method of claim 8 , further comprising removing the triangular surface feature from the multi-layer grinding wheel prior to the laser ablating the crescent shaped surface feature. 11. The method of claim 8 , wherein the laser ablating the triangular surface feature comprises steering a laser with a galvanometer.
Positioning devices for conditioning tools · CPC title
for making a groove or trench, e.g. for scribing a break initiation groove · CPC title
involving the use of electric current · CPC title
for workpieces having a grooved profile, e.g. gears, splined shafts, threads, worms (B24B53/07 takes precedence) · CPC title
of cylindrical or conical surfaces on abrasive tools or wheels (B24B53/017 takes precedence) · CPC title
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