Microelectromechanical mirror assembly

Patent metadata

Field	Value
Publication number	US-9874817-B2
Application number	US-201414469397-A
Country	US
Kind code	B2
Filing date	Aug 26, 2014
Priority date	Aug 26, 2013
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. A distal end of the element flexure is coupled to the optical element near the element perimeter, a distal end of the base flexure is coupled to the base, and a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis.

First claim

What is claimed is:

1. An optical element assembly for adjusting the characteristics of a beam, the optical element assembly comprising:
a base; and
a first element unit that includes (i) an optical element having an element central axis and an element perimeter; (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a first flexure assembly having an element flexure and a base flexure; (iii) a unit mover assembly that moves the optical element relative to the base between a first position and a second position; and (iv) a joiner coupled to a first end of the element flexure and to a first end of the base flexure, wherein a second end of the element flexure is coupled to the optical element, wherein a second end of the base flexure is coupled to the base, and wherein the joiner has a thickness that is approximately equal to a movement distance of the optical element along the element central axis from the first position to the second position.

2. An optical element assembly for adjusting the characteristics of a beam, the optical element assembly comprising:
a base; and
a first element unit that includes (i) an optical element having an element central axis and an element perimeter; (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a first flexure assembly having an element flexure and a base flexure, wherein a distal end of the element flexure is coupled to the optical element, wherein a distal end of the base flexure is coupled to the base, and wherein a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis; and (iii) a unit mover assembly that moves the optical element along the element central axis relative to the base to change a phase of the beam, the unit mover assembly moving the optical element along the element central axis between a first position and a second position, wherein the element flexure contacts the base flexure when the optical element is at the second position.

3. An optical element assembly for adjusting the characteristics of a beam, the optical element assembly comprising:
a base;
an optical element which the beam is incident thereon, the optical element including an element central axis;
a first flexure arranged between the optical element and the base, the first flexure having a first length that extends in a first direction that crosses a normal of the base, the first flexure having a first end that is coupled to the optical element;
a second flexure arranged between the first flexure and the base, the second flexure having a second length that extends in the first direction, the second flexure having a second end that is coupled to a third end of the first flexure; and
a mover which moves the optical element in a second direction that crosses a surface of the base between a first position and a second position,
wherein the first end of the first flexure and the third end of the first flexure move different distances than one another when the optical element is moved between the first position and the second position; wherein a fourth end of the second flexure and the second end of the second flexure move different distances than one another when the optical element is moved between the first position and the second position; and wherein the first end of the first flexure is located further from the element central axis along the first direction than is the third end of the first flexure.

4. The optical element assembly of claim 3 , further comprising a joiner having a thickness that is measured in the second direction, the joiner coupling the third end of the first flexure to the second end of the second flexure.

5. The optical element assembly of claim 4 , further comprising a first connector having a thickness that is measured in the second direction, the first connector connecting the first end of the first flexure and the optical element.

6. The optical element assembly of claim 4 , further comprising a second connector having a thickness that is measured in the second direction, the second connector connecting the fourth end of the second flexure and the base.

7. The optical element assembly of claim 3 , further comprising a plurality of the first flexures, and a plurality of the second flexures.

8. The optical element assembly of claim 7 , wherein each of the plurality of the first flexures and the plurality of second flexures extend from near the element central axis of the optical element to near an outer perimeter of the optical element.

9. The optical element assembly of claim 7 , wherein the plurality of first flexures includes more than three first flexures, and wherein the plurality of second flexures includes more than three second flexures.

10. The optical element assembly of claim 3 , wherein when the optical element is moved from the first position to the second position, the first flexure flexes in a first flex direction and the second flexure flexes in a second flex direction that is opposite to the first flex direction.

11. The optical element assembly of claim 3 , wherein the first flexure and the second flexure each extend from near the element central axis of the optical element to near an outer perimeter of the optical element.

12. The optical element assembly of claim 3 , further comprising a first connector which connects the optical element and the first end of the first flexure, and a second connector which connects the base and the fourth end of the second flexure.

13. An exposure apparatus which exposes a workpiece with an exposure light, comprising:
the optical element assembly of claim 3 ;
an illumination optical system which illuminates the optical element assembly with the exposure light; and
a projection optical system which leads the exposure light from the optical element assembly to the workpiece and which projects a pattern on the workpiece.

14. A device manufacturing method comprising:
forming a pattern of photosensitive layer on the workpiece using the exposure apparatus of claim 13 ;
processing the workpiece which has the pattern.

15. The optical element assembly of claim 3 wherein the first flexure and the second flexure are substantially parallel to one another and are aligned with one another relative to the second direction when the optical element is in the first position.

16. An optical element assembly for adjusting the characteristics of a beam, the optical element assembly comprising:
a base;
an optical element which the beam is incident thereon;
a first flexure arranged between the optical element and the base, the first flexure having a first length that extends in a first direction that crosses a normal of the base, the first flexure having a first end that is coupled to the optical element;
a second flexure arranged between the first flexure and the base, the second flexure having a second length that extends in the first direction, the second flexure having a second end that is coupled to a third end of the first flexure;
a mover which moves the optical element in a second direction that crosses a surface of the base between a first position and a second position; and
a joiner having a thickness that is measured in the second direction, the joiner coupling the third end of the first flexure to the second end of the second flexure;
wherein the first end of the first flexure and the third end of the first flexure move different distances than one another when the optical element is moved between the f

Assignees

• Nippon Kogaku Kk

Inventors

• Palmer Shane R
• Binnard Michael

Classifications

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title

• G03F7/70075

  Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection · CPC title

• G02B26/06 Primary

  for controlling the phase of light (G02B26/08 takes precedence {, measuring optical phase difference G01J9/00}) · CPC title

• G03F7/70058 Primary

  Mask illumination systems · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title