Atomic-force microscope system with integrated fabry-perot resonator

Patent metadata

Field	Value
Publication number	US-9869695-B1
Application number	US-201615248746-A
Country	US
Kind code	B1
Filing date	Aug 26, 2016
Priority date	Aug 26, 2016
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

An atomic-force microscope system is provided including: an electrically conducting cantilever support; an electrically insulating element; and an electrically conducting cantilever anchored at a first end to the cantilever support via the insulating element, the cantilever including a probe tip at a second end opposite to the first end and the cantilever support is configured as a backside electrode of the cantilever for backside actuation thereof; a Fabry-Perot interferometer including: a resonator with a first mirror defined on the cantilever; and a second mirror defined on the cantilever support having a first side and a second side configured to allow light injection, opposite to the first side, the latter extending at least partly vis-à-vis the first mirror. The interferometer includes a light-emitting device, and a detector configured for detecting a property of the system impacted by interferences of light emitted by the light-emitting device. Methods of operations are also provided.

First claim

What is claimed is:

1. An atomic-force microscope system, comprising:
an electrically conducting cantilever support;
an electrically insulating element;
an electrically conducting cantilever anchored at a first end to the cantilever support via the insulating element,

wherein:
the cantilever comprises a probe tip at a second end thereof; and
the cantilever support is configured as a backside electrode of the cantilever for backside actuation thereof,

and wherein the system further comprises:
a Fabry-Perot interferometer, comprising:
a resonator with:
a first mirror, defined on the cantilever; and
a second mirror, defined on the cantilever support, having a first side and a second side configured to allow light injection, opposite to said first side, the latter extending at least partly vis-à-vis the first mirror;

a light-emitting device, configured to emit light toward said second side; and
a detector, configured for detecting a property of the system impacted by interferences of light emitted by the light-emitting device that is confined between the first mirror and the second mirror, the interferences depending on a deflection of the cantilever, in operation.

2. The atomic-force microscope system according to claim 1 , wherein
the detector comprises one or more photodetectors, configured in the system to sense changes in said interferences of light upon deflection of the cantilever, in operation.

3. The atomic-force microscope system according to claim 2 , wherein
the detector comprises a photodiode, which is arranged so as to intercept an optical path of light confined in the resonator and is integral with one of: the cantilever; and the cantilever support.

4. The atomic-force microscope system according to claim 3 , wherein
said photodiode is a p-n junction photodiode or as a PIN junction photodiode.

5. The atomic-force microscope system according to claim 4 , wherein
the cantilever comprises an element arranged so as to intercept said optical path and configured as said photodiode.

6. The atomic-force microscope system according to claim 1 , wherein
the system comprises no diffraction grating between the first mirror and the second mirror.

7. The atomic-force microscope system according to claim 1 , wherein the system further comprises:
a feedback unit, connected to said detector to receive first signals therefrom and transmit second signals dependent on the first signals received; and
a height controller connected to the feedback unit to receive said second signals and configured to apply a voltage between said cantilever support and said cantilever, according to said second signals.

8. The atomic-force microscope system according to claim 1 , wherein
the cantilever, the insulating element and the cantilever support have a silicon-on-insulator type of silicon-insulator-silicon structure.

9. The atomic-force microscope system according to claim 1 , wherein
said first mirror comprises three superimposed layers arranged on the cantilever, wherein a first one of the layers is an optical spacer that comprises SiO 2 , a second one of these layers comprises a reflective substance coated on the first one of the layers, and a third one of the layers is coated on the reflective substance and comprises SiO 2 .

10. The atomic-force microscope system according to claim 9 , wherein
the reflective substance comprises silver and the second one of the layers has a thickness of 50 nm, the first one of the layers having a thickness of 30 nm.

11. The atomic-force microscope system according to claim 1 , wherein
said second mirror comprises a distributed Bragg reflector (DBR).

12. The atomic-force microscope system according to claim 11 , wherein
said DBR comprises multiple pairs of layers, each of the pairs comprising a layer of SiO 2 and a layer of Ta 2 O 5 .

13. The atomic-force microscope system according to claim 12 , wherein
the DBR comprises 8 pairs of layers, wherein the thickness of each of the layers in each of the pairs is equal to l/4n, where l is the average wavelength of light emitted by the light-emitting device and n is the refractive index of said each of the layers.

14. The atomic-force microscope system according to claim 12 , wherein
said DBR is arranged on a recessed surface of the support.

15. The atomic-force microscope system according to claim 1 , wherein
an average thickness of the cantilever is between 0.3 and 3 μm.

16. The atomic-force microscope system according to claim 15 , wherein
an average thickness of the insulating element is between 1 and 3 μm.

17. The atomic-force microscope system according to claim 16 , wherein
a maximal thickness of the cantilever support is between 450 and 600 μm.

18. A method for measuring a deflection of a cantilever of an atomic-force microscope system according to claim 1 , the method comprising, while scanning a sample surface:
energizing the light-emitting device for it to emit light toward said second side, so as to confine emitted light between the first mirror and the second mirror; and
detecting, with said detector, a property of the system that is impacted by interferences of the confined light, the interferences dependent on a deflection of the cantilever.

19. The method according to claim 18 , wherein the detector comprises one or more photodetectors, configured in the system to sense changes in said interferences of light upon deflection of the cantilever, in operation, and wherein the detecting further comprises sensing changes in said interferences of light upon deflection of the cantilever, via said one or more photodetectors.

20. The method according to claim 18 , wherein the cantilever comprises an element arranged so as to intercept said optical path and configured as said photodiode, and wherein the detecting comprises sensing changes of light intensity via said photodiode.

Assignees

• IBM

Inventors

• Drechsler Ute
• Duerig Urs T
• Knoll Armin
• Stoeferle Thilo

Classifications

• G01B9/02

  Interferometers · CPC title

• G01Q20/02 Primary

  by optical means · CPC title

• G01B2290/25

  Fabry-Perot in interferometer, e.g. etalon, cavity · CPC title

• G01Q20/04

  Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge · CPC title