Method of increasing zinc sulfide hardness

Patent metadata

Field	Value
Publication number	US-9863040-B2
Application number	US-201615178601-A
Country	US
Kind code	B2
Filing date	Jun 10, 2016
Priority date	Sep 26, 2013
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

A method is directed to increasing the hardness of zinc sulfide. The hardness of zinc sulfide is increased by adding selective elements within a specified range to the crystal lattice of the zinc sulfide. The increased hardness over conventional zinc sulfide does not substantially compromise the optical properties of the zinc sulfide. The zinc sulfide may be used as a protective coating for windows and domes.

First claim

What is claimed is:

1. A method comprising:
a) providing a source of zinc, a source of sulfur and a source of one or more dopants chosen from selenium and silicon;
b) injecting the source of zinc as a gas at 0.2 to 1 slpm, the source of sulfur as a gas at 0.1 to 0.9 slpm and the one or more sources of selenium and silicon as a gas at 0.01 slpm to 0.1 slpm into a chemical vapor deposition chamber comprising an inert gas, the pressure in the chemical vapor deposition chamber ranges from 20 to 50 Torr; and
c) chemical vapor depositing one or more layers of a composition comprising zinc sulfide and 0.5 molar % to 10 molar % of one or more of the dopants chosen from selenium and silicon on a substrate, a temperature of the substrate is from 600° C. to 800° C.

2. The method of claim 1 , further comprising treating the composition comprising zinc sulfide and 0.5 molar % to 10 molar % of one or more of the dopants chosen from selenium and silicon by a HIP process.

Assignees

• Rohm & Haas Elect Mat
• Dow Global Technologies Llc

Inventors

• Goela Jitendra S
• Wang Hangyao
• Bai Hua
• Pickering Michael A

Classifications

• C23C16/306 Primary

  AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te · CPC title

• C23C16/305

  Sulfides, selenides, or tellurides · CPC title

• C23C16/01

  on temporary substrates, e.g. substrates subsequently removed by etching · CPC title

• C03C2217/288

  Sulfides · CPC title

• C03C17/22

  with other inorganic material (C03C17/34, C03C17/44 take precedence) · CPC title