Deposition apparatus and tray holder

Patent metadata

Field	Value
Publication number	US-9861996-B2
Application number	US-201514620433-A
Country	US
Kind code	B2
Filing date	Feb 12, 2015
Priority date	Mar 11, 2014
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

A deposition apparatus includes a deposition source; a rotatable dome provided with an opening which covers the source; a first lever provided outside of the dome; and a tray holder including a frame including a first rotating member and a rotating part including a second rotating member and being attached to the frame such that the rotating part rotates with the second rotating member around an axis supported by the frame. The rotating part includes work-holding trays arranged around the axis, the tray holder is installed on the dome such that a side of one of the trays covers the opening, the first rotating member is rotated by the first lever during rotation of the dome, and the second rotating member is rotated with the rotating part by the first rotating member so as to change the tray a side of which covers the opening to another one.

First claim

What is claimed is:

1. A deposition apparatus comprising:
a deposition source;
a rotatable dome which covers the deposition source and is provided with an opening, the rotatable dome being capable of rotating around a first axis;
a first lever provided outside of the dome; and
a tray holder which is provided with a frame and a rotating part, the frame being provided with a first rotating member, the rotating part being provided with a second rotating member and being attached to the frame such that the rotating part is capable of rotating together with the second rotating member around a second axis supported by the frame;
wherein the rotating part is provided with a plurality of work-holding trays arranged around the second axis,
the tray holder is installed on the dome such that a side of one of the plurality of work-holding trays covers the opening,
the first rotating member is configured such that the first rotating member is rotated around a third axis by the first lever during rotation of the dome, and
the second rotating member is configured such that the second rotating member is rotated around the second axis together with the rotating part by the first rotating member so as to change the side of one of the plurality of work-holding trays which covers the opening to another side of one of the plurality of work-holding trays, and
wherein the first axis, the second axis and the third axis are different from each other.

2. A deposition apparatus according to claim 1 , wherein the first lever is configured such that the position can be switched between a standby position in which the first lever is not brought into contact with the first rotating member during rotation of the dome and a working position in which the first lever is brought into contact with the first rotating member during rotation of the dome, and
the first rotating member is configured such that the first rotating member is rotated by the first lever during rotation of the dome when the first lever is in the working position.

3. A deposition apparatus according to claim 1 , further comprising a tray-detecting contact installed outside of the dome,
wherein the rotating part is further provided with tray indicating contacts each of which corresponds to one of the plurality of work-holding trays and which are to be brought into contact with the tray-detecting contact during rotation of the dome.

4. A deposition apparatus according to claim 1 , further comprising a second lever installed outside of the dome,
wherein the rotating part is further provided with third rotating members each of which corresponds to one of the plurality of work-holding trays,
each of the plurality of work-holding trays is provided with a fourth rotating member and is attached to the rotating part such that each of the plurality of work-holding trays is capable of rotating together with the fourth rotating member around a fourth axis supported by the rotating part,
the third rotating members are configured to rotate by the second lever during rotation of the dome, and
the fourth rotating member is configured such that the fourth rotating member is rotated together with each of the plurality of work-holding trays by one of the third rotating members so as to turn over each of the plurality of work-holding trays.

5. A deposition apparatus according to claim 4 , wherein the second lever is configured such that the position can be switched between a standby position in which the second lever is not brought into contact with the third rotating members during rotation of the dome and a working position in which the second lever is brought into contact with the third rotating members during rotation of the dome, and
the third rotating members are configured such that the third rotating members are rotated by the second lever during rotation of the dome when the second lever is in the working position.

6. A deposition apparatus according to claim 4 , further comprising a tray-side detecting contact installed outside of the dome,
wherein each of the plurality of work-holding trays is further provided with tray-side indicating contacts each of which is to be brought into contact with the tray-side detecting contact during rotation of the dome.

7. A deposition apparatus according to claim 1 , further comprising a home-position detecting contact installed outside of the dome and a plurality of tray holders,
wherein one of the plurality of tray holders is provided with a contact for indicating the home position of rotation, and the contact is to be brought into contact with the home-position detecting contact during rotation of the dome.

8. A deposition apparatus according to claim 1 , wherein the rotating part is provided with three work-holding trays.

Assignees

• Nalux Co Ltd

Inventors

• Higuchi Toshiro
• Ueno Hiroshi
• Kimura Hitoshi

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• B05B12/08

  responsive to condition of liquid or other fluent material {to be} discharged, of ambient medium or of target {; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means} · CPC title

• B05B13/0242 Primary

  the objects being individually presented to the spray heads by a rotating element, e.g. turntable · CPC title

• H01L21/68764

  Electricity · mapped topic

• C23C14/505 Primary

  for rotation of the substrates · CPC title