Coating apparatus, coating method and storage medium

Patent metadata

Field	Value
Publication number	US-9776199-B2
Application number	US-201514658461-A
Country	US
Kind code	B2
Filing date	Mar 16, 2015
Priority date	Mar 17, 2014
Publication date	Oct 3, 2017
Grant date	Oct 3, 2017

Abstract

A coating apparatus includes: a rotation holding unit configured to hold and rotate a substrate; a coating liquid supply unit configured to supply a coating liquid onto a surface of the substrate; and a control unit configured to control the rotation holding unit and the coating liquid supply unit. The control unit performs: controlling the coating liquid supply unit to supply the coating liquid onto an encircling line surrounding a rotational center of the substrate while controlling the rotation holding unit to rotate the substrate; followed by controlling the coating liquid supply unit to supply the coating liquid onto a central area; and followed by controlling the rotation holding unit to rotate the substrate at an angular velocity greater than that when the coating liquid is supplied onto the encircling line.

First claim

What is claimed is:

1. A coating method for use in a coating apparatus, the method comprising:
supplying a coating liquid onto an encircling line surrounding a rotational center of a substrate while rotating the substrate;
supplying the coating liquid onto a central area, which is positioned inside the encircling line and includes the rotational center of the substrate; and
rotating the substrate at an angular velocity greater than that when supplying the coating liquid onto the encircling line such that the coating liquid on the encircling line and the central area widely spreads toward a periphery of the substrate,
wherein the coating liquid is supplied onto the encircling line which is formed by multifold lines, and
wherein the coating liquid is supplied onto the encircling line which includes a plurality of loop lines and connection lines connecting between the loop lines, the connection lines gradually approaching the rotational center while being branched from the middle of each of the loop lines in a circumferential direction.

2. The method of claim 1 , wherein the coating liquid is supplied onto the encircling line of which the outermost circumference portion is positioned within a range of 30 to 70% of a radius of the substrate.

3. The method of claim 1 , wherein, in supplying the coating liquid onto the connection lines, the substrate is rotated at an angular velocity higher than that when supplying the coating liquid onto the loop lines.

4. The method of claim 1 , wherein the coating liquid on the central area crosses the outermost circumference portion in the encircling line to widely spread toward the periphery of the substrate.

5. A non-transitory computer-readable storage medium storing a program operating on a computer stored thereon,
wherein the program, when executed, causes the computer to perform the coating method of claim 1 using a coating apparatus.

Assignees

• Tokyo Electron Ltd

Inventors

• Kubota Minoru

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05D1/005

  Spin coating · CPC title

• H01L21/00

  Electricity · mapped topic

• B05B13/0242

  the objects being individually presented to the spray heads by a rotating element, e.g. turntable · CPC title