Method for producing oxygen sensor
US-9829463-B2 · Nov 28, 2017 · US
Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member
US9856147B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9856147-B2 |
| Application number | US-201615215884-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 21, 2016 |
| Priority date | Jul 29, 2015 |
| Publication date | Jan 2, 2018 |
| Grant date | Jan 2, 2018 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE 2 O 4 . Such a ceramic material may be manufactured by, for example, preparing a material containing MRE 2 O 4 or a material capable of reacting in thermal spray flame to produce MRE 2 O 4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.
First claim
Opening claim text (preview).
What is claimed is: 1. A ceramic material includes a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE, wherein the Group II element M is Sr, Ca, or Ba, wherein an XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE 2 O 4 , which first new peak is a peak of a ceramic material containing a complex oxide other than MRE 2 O 4 , and wherein the M/RE mole ratio obtained from results of an elemental analysis of the entirety of the ceramic material is less than 0.48. 2. The ceramic material according to claim 1 , wherein the XRD diagram of the ceramic material shows a second new peak between peaks derived from the (410) plane and the (311) plane of MRE 2 O 4 , which second new peak is a peak of a ceramic material containing a complex oxide other than MRE 2 O 4 . 3. The ceramic material according to claim 1 , wherein the ceramic material contains a MRE 2 O 4 crystalline phase. 4. The ceramic material according to claim 1 , wherein the Group II element M is Sr, and the rare earth element RE is Y, Er, or Yb. 5. The ceramic material according to claim 1 , wherein the ratio (A)/(B) of the intensity (A) of the first new peak to the intensity (B) of the peak derived from the (320) plane of MRE 2 O 4 is larger than 0.8. 6. The ceramic material according to claim 1 , wherein the O/RE mole ratio obtained from the results of an elemental analysis of the entirety of the ceramic material is 2.1 or less. 7. The ceramic material according to claim 1 , wherein the ceramic material has a porosity of 5% or less. 8. A semiconductor manufacturing apparatus member covered with the ceramic material according to claim 1 . 9. A method for manufacturing the ceramic material according to claim 1 , the method comprising preparing a thermal spray material, the thermal spray material being a material containing MRE 2 O 4 or a material capable of reacting in thermal spray flame to produce MRE 2 O 4 and thermally spraying the thermal spray material onto a predetermined object. 10. A ceramic material includes a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE, wherein the Group II element M is Sr, Ca, or Ba, wherein an XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE 2 O 4 , which first new peak is a peak of a ceramic material containing a complex oxide other than MRE 2 O 4 , and wherein the ceramic material has a porosity of 5% or less.
Assignees
Inventors
Classifications
- C01F17/32Primary
oxide or hydroxide being the only anion, e.g. NaCeO2 or MgxCayEuO · CPC title
- C04B35/6261Primary
Milling · CPC title
Oxides · CPC title
Granulation or pelletising (devices for shaping artificial aggregates from ceramic mixtures B28B1/004) · CPC title
Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics · CPC title
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- What does patent US9856147B2 cover?
- The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE 2 O 4 . Such a ceramic material may be manufactured by, for example, …
- Who is the assignee on this patent?
- Ngk Insulators Ltd
- What technology area does this patent fall under?
- Primary CPC classification C01F17/32. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 02 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).