Electromigration testing of interconnect analogues having bottom-connected sensory pins

Patent metadata

Field	Value
Publication number	US-9851397-B2
Application number	US-201514635125-A
Country	US
Kind code	B2
Filing date	Mar 2, 2015
Priority date	Mar 2, 2015
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A system for electromigration testing is disclosed. The system includes a conductive member, a cap layer of insulative material over at least a portion of a top surface of the conductive member, a cathode conductively connected to a first end of the conductive member; an anode conductively connected to a second end of the conductive member, and a current source conductively connected to the cathode and the anode. A plurality of sensory pins are disposed along a length of the conductive member between the first end and the second end of the conductive member. The sensory pins are conductively connected to a bottom surface of the conductive member. At least one measurement device is conductively connected to at least one sensory pin of the plurality of sensory pins. The at least one measurement device determines a resistance of at least one portion of the conductive member.

First claim

What is claimed is:

1. A system for electromigration testing, the system comprising:
a conductive member;
a cap layer of insulative material over at least a portion of a top surface of the conductive member;
a cathode conductively connected to a first end of the conductive member;
an anode conductively connected to a second end of the conductive member, wherein the conductive member conductively connects the anode and the cathode;
a current source conductively connected to the cathode and anode, wherein the current source provides a current that flows through the conductive member;
a plurality of sensory pins disposed along a length of the conductive member between the first end and the second end of the conductive member, the sensory pins conductively connected to a bottom surface of the conductive member;
at least one measurement device conductively connected to at least one sensory pin of the plurality of sensory pins, wherein the at least one measurement device determines a resistance of at least one portion of the conductive member; and
a switch conductively connected to the at least one measurement device and each sensory pin of the plurality of sensory pins, wherein the switch selectively allows an electrical connection between a measurement device of the at least one measurement device, a first structure, and a second structure, and wherein the measurement device determines a resistance of a portion of the conductive member that is between the first structure and the second structure.

2. The system of claim 1 , wherein the first structure is a first sensory pin of the plurality of sensory pins, and wherein the second structure is a second sensory pin of the plurality of sensory pins.

3. The system of claim 1 , wherein the first structure is a first sensory pin of the plurality of sensory pins, and wherein the second structure is the cathode.

4. The system of claim 1 , wherein the first structure is a first sensory pin of the plurality of sensory pins, and wherein the second structure is the anode.

5. The system of claim 1 , wherein the at least one measurement device measures a voltage between the first structure and the second structure, and wherein the at least one measurement device determines the resistance based, at least in part, on a magnitude of the voltage.

6. The system of claim 1 , further comprising: at least one leakage monitor, each at least one leakage monitor positioned to detect a leakage current, wherein the leakage current is an electrical current that is induced in the leakage monitor by the current that flows through the conductive member.

7. The system of claim 6 , wherein the at least one leakage monitor includes a leakage monitor to which current is selectively applied in order to heat the conductive member.

8. The system of claim 6 , further comprising: a thermometer, wherein the at least one leakage monitor includes a leakage monitor that is conductively connected to the thermometer such that the thermometer determines an ambient temperature at one or more points in an environment that includes the conductive member.

9. The system of claim 6 , wherein the at least one leakage monitor includes a leakage monitor having a side surface that is adjacent to, and substantially parallel with, at least a portion of a side surface of the conductive member.

10. The system of claim 6 , wherein the at least one leakage monitor includes a leakage monitor oriented in a substantially parallel direction to the conductive member and positioned above the cap layer.

11. The system of claim 6 , wherein the at least one leakage monitor includes a leakage monitor having a length that is substantially collinear with a length of the conductive member.

12. A method for electromigration testing, the method comprising:
causing a current to flow through a conductive member; and
determining a resistance of at least one portion of the conductive member using at least one measurement device, and wherein:
a cap layer of insulative material is disposed over at least a portion of a top surface of the conductive member,
a plurality of sensory pins is disposed along a length of the conductive member between a first end of the conductive member and a second end of the conductive member,
each sensory pin of the plurality of sensory pins is conductively connected to a bottom surface of the conductive member,
each at least one portion of the conductive member includes at least one sensory pin of the plurality of the sensory pins,
the at least one measurement device is conductively connected to at least one sensory pin of the plurality of sensory pins, and
a switch is conductively connected to the at least one measurement device and each sensory pin of the plurality of sensory pins, wherein the switch selectively allows an electrical connection between a measurement device of the at least one measurement device, a first structure, and a second structure, and wherein the measurement device determines a resistance of a portion of the conductive member that is between the first structure and the second structure.

13. The method of claim 12 , wherein the first structure is a first sensory pin of the plurality of sensory pins, and wherein the second structure is a second sensory pin of the plurality of sensory pins.

14. The method of claim 12 , further comprising: measuring a voltage, wherein the voltage is measured between the first structure and the second structure, and wherein the at least one measurement device determines the resistance based, at least in part, on a magnitude of the voltage.

15. The method of claim 12 , further comprising: determining a magnitude of a leakage current, wherein the leakage current is an electrical current that is induced in at least one leakage monitor by the current that is caused to flow through the conductive member.

16. The method of claim 15 , further comprising: determining an ambient temperature at one or more points in an environment that includes the conductive member, wherein the at least one leakage monitor includes a leakage monitor that is conductively connected to a thermometer that determines the ambient temperature.

17. The method of claim 15 , further comprising: heating the conductive member, wherein the at least one leakage monitor includes a leakage monitor that provides resistive heating when a current is applied.

18. An apparatus for electromigration testing, the apparatus comprising:
a plurality of conductive members embedded in a substrate, wherein each conductive member of the plurality of conductive member comprises:
a first end conductively connected to a first active via;
a second end conductively connected to a second active via; and
a plurality of sensory pins disposed along a length of the conductive member between the first end and the second end of the conductive member, wherein each sensory pin has a first end that is conductively connected to a bottom surface of the conductive member, and wherein each sensory pin has a second end that is at least partially exposed;
at least one measurement device conductively connected to at least one sensory pin of the plurality of sensory pins, wherein the at least one measurement device determines a resistance of at least one portion of the conductive member; and
a switch conductively connected to the at least one measurement device and each sensory pin of the plurality of sensory pins, wherein the switch selectively allows an electrical connection between a measurement device of the at least one measurement device, a first structure, and a second

Assignees

• Globalfoundries Inc

Inventors

• Chen Fen
• Christiansen Cathryn J
• Massey Deborah M
• Periasamy Prakash
• Shinosky Michael A

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• G01N1/00

  Sampling; Preparing specimens for investigation · CPC title

• G01R31/2858 Primary

  Measuring of material aspects, e.g. electro-migration [EM], hot carrier injection · CPC title

• H01L2221/00

  Electricity · mapped topic

• H01L21/00

  Electricity · mapped topic