Separation apparatus

Patent metadata

Field	Value
Publication number	US-9849660-B2
Application number	US-201615165099-A
Country	US
Kind code	B2
Filing date	May 26, 2016
Priority date	May 27, 2015
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A yield in a separation process is improved. A separation apparatus which enables easy separation in a large-area substrate is provided. The separation apparatus has a function of dividing a process member into a first member and a second member and includes a support body supply unit, a support body hold unit, a transfer mechanism, a direction changing mechanism, and a structure body. The structure body bonds a support body to a surface of the first member. When at least part of the process member is located between the direction changing mechanism and the structure body or the pressure applying mechanism, the shortest distance between the direction changing mechanism and a first plane including the surface of the first member is longer than the shortest distance between the first plane and the structure body or the pressure applying mechanism.

First claim

What is claimed is:

1. A separation apparatus comprising:
a support body supply unit;
a support body hold unit;
a direction changing mechanism; and
a first structure body,
wherein the direction changing mechanism is located between the support body supply unit and the support body hold unit,
wherein the first structure body is located between the direction changing mechanism and the support body hold unit,
wherein the support body supply unit is configured to feed a support body having a sheet-like shape,
wherein the support body supply unit includes one of a pair of tension applying mechanisms,
wherein the support body hold unit includes the other of the pair of tension applying mechanisms,
wherein the pair of tension applying mechanisms is configured to apply tension to the support body,
wherein the direction changing mechanism is configured to change a feed direction of the support body from a first direction to a second direction,
wherein the first structure body is configured to change the feed direction of the support body from the second direction to a third direction,
wherein the first structure body includes a convex surface,
wherein the first structure body is configured to bond the support body to a surface of a process member,
wherein the first structure body is configured to change the feed direction of the support body along the convex surface to divide the process member into a first member and a second member, and
wherein when at least part of the process member is located between the direction changing mechanism and the first structure body, a shortest distance between the direction changing mechanism and a first plane including the surface of the first member is longer than a shortest distance between the first plane and the first structure body.

2. The separation apparatus according to claim 1 , wherein an angle at which the first structure body bends back the support body is an obtuse angle.

3. The separation apparatus according to claim 1 , further comprising a second structure body having a convex surface,
wherein the second structure body is located between the first structure body and the support body hold unit,
wherein the second structure body is configured to send the support body from the first structure body to the support body hold unit along the convex surface, and
wherein the second structure body is configured to apply tension to the support body by moving the shaft of the second structure body.

4. The separation apparatus according to claim 3 , wherein a radius of curvature of the convex surface included in the first structure body is larger than a radius of curvature of the convex surface included in the second structure body.

5. The separation apparatus according to claim 1 , further comprising a second structure body having a convex surface,
wherein the second structure body is located between the first structure body and the support body hold unit,
wherein the second structure body is configured to send the support body from the first structure body to the support body hold unit along the convex surface, and
wherein the second structure body is configured to control an angle at which the first structure body bends back the support body.

6. The separation apparatus according to claim 5 , wherein a radius of curvature of the convex surface included in the first structure body is larger than a radius of curvature of the convex surface included in the second structure body.

7. The separation apparatus according to claim 1 , further comprising a fixing mechanism,
wherein the fixing mechanism is configured to fix the second member at least part of which is separated from the first member.

8. The separation apparatus according to claim 1 , further comprising a liquid supply mechanism,
wherein the liquid supply mechanism is configured to supply liquid between the first member and the second member.

9. The separation apparatus according to claim 1 , wherein the radius of curvature of the convex surface included in the first structure body is greater than or equal to 0.5 mm and less than or equal to 1000 mm.

10. The separation apparatus according to claim 1 , further comprising a reel,
wherein the reel is located between the support body supply unit and the support body hold unit,
wherein a tape is bonded to one surface of the support body, and
wherein the reel is configured to wind up the tape.

11. A separation apparatus comprising:
a support body supply unit;
a support body hold unit;
a direction changing mechanism;
a pressure applying mechanism;
a first structure body; and
a second structure body,
wherein the direction changing mechanism is located between the support body supply unit and the support body hold unit,
wherein the first structure body is located between the direction changing mechanism and the support body hold unit,
wherein the pressure applying mechanism is located between the direction changing mechanism and the first structure body,
wherein the support body supply unit is configured to feed a support body having a sheet-like shape,
wherein the support body supply unit includes one of a pair of tension applying mechanisms,
wherein the support body hold unit includes the other of the pair of tension applying mechanisms,
wherein the pair of tension applying mechanisms is configured to apply tension to the support body,
wherein the direction changing mechanism is configured to change a feed direction of the support body from a first direction to a second direction,
wherein the pressure applying mechanism is configured to change the feed direction of the support body from the second direction to a third direction,
wherein the pressure applying mechanism is configured to bond the support body to a surface of a process member,
wherein the first structure body includes a convex surface,
wherein the first structure body is configured to change the feed direction of the support body along the convex surface to divide the process member into a first member and a second member,
wherein when at least part of the process member is located between the direction changing mechanism and the pressure applying mechanism, a shortest distance between the direction changing mechanism and a first plane including the surface of the first member is longer than a shortest distance between the first plane and the pressure applying mechanism,
wherein the second structure body includes a convex surface,
wherein the second structure body is located between the first structure body and the support body hold unit,
wherein the second structure body is configured to send the support body from the first structure body to the support body hold unit along the convex surface, and
wherein the second structure body is configured to control an angle at which the first structure body bends back the support body.

12. The separation apparatus according to claim 11 , wherein the angle at which the first structure body bends back the support body is an obtuse angle.

13. The separation apparatus according to claim 11 ,
wherein the second structure body is configured to apply tension to the support body by moving the shaft of the second structure body.

14. The separation apparatus according to claim 11 , wherein a radius of curvature of the convex surface included in the first structure body is larger than a radius of curvature of the convex surface included in the second structure body.

15. The separation apparatus according to claim 11 , further comprising a fixing mechanism,
wherein the fixing mechanism is configured to fix the second

Assignees

• Semiconductor Energy Lab

Inventors

• Eguchi Saki
• Takeshima Koichi
• Adachi Hiroki

Classifications

• H10P72/7446

  using a peeling wheel · CPC title

• H10P72/7444

  using a peeling wedge, a knife or a bar · CPC title

• H10P72/7442

  Separation by peeling · CPC title

• H10P72/7432

  used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate · CPC title

• H10P72/7426

  used as a support during build up manufacturing of active devices · CPC title