Reinforced sample for transmission electron microscope

Patent metadata

Field	Value
Publication number	US-9837246-B1
Application number	US-201615217968-A
Country	US
Kind code	B1
Filing date	Jul 22, 2016
Priority date	Jul 22, 2016
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

A lamella for observation on a transmission electron microscope and other analytical instruments includes multiple thin regions separated by thicker regions or ribs. In some embodiments, the lamella can be wider than 50 μm with more than 10 multiple thin regions, with each thin region may being as thin as 10 nm or even thinner. The process for making such lamellae lends itself to automation. The process is fault tolerant in that not all of the multiple thin regions need to be useable as long as one region provides a useful image. Redeposition is reduced because ion beam imaging is reduced in the automated process and because the ribs reduce redeposition between regions.

First claim

We claim as follow:

1. A method for preparing a thin, reinforced lamellar structure using a charged particle beam system, comprising:
directing a charged particle beam toward a work piece to form a lamella having a thickness of less than 300 nm;
extracting the lamella from the work piece;
attaching the lamella to a TEM grid;
directing the charged particle beam to mill a first region on a first side of the lamella, each point in the first milled region receiving a dose of ions from the charged particle beam;
directing the charged particle beam to mill a second region on the first side of the lamella, each point in the second milled region receiving a dose of ions from the charged particle beam; and
the first region and the second region being separated by a third region having a thickness greater than the thickness of the first region or of the second region, the points in the third region receiving a dose of ions that is less than the dose of ions received at points in the first region or the second region, thereby producing a reinforcing rib between the first region and the second region to mechanically strengthen the lamella.

2. The method of claim 1 , in which directing a charged particle beam toward a work piece to form a lamella comprises directing a charged particle beam toward a work piece to form a lamella having a width greater than 8 μm.

3. The method of claim 2 in which the lamella has a width of greater than 20 μm.

4. The method of claim 2 in which the lamella has a width of between 8 μm and 50 μm.

5. The method of claim 1 , in which the thickness of the third region is greater than 5% thicker than the greater of the thickness of the first region and the second region.

6. The method of claim 1 , in which the thicknesses of the first region and the second region are less than 20 nm.

7. The method of claim 1 , further comprising:
forming a fiducial on the lamella; and
after directing the charged particle beam toward points in a first region of the lamella and before toward points in a first region of the lamella, directing the charged particle beam toward the fiducial to align the charged particle beam with the lamella.

8. The method of claim 1 , further comprising:
directing the charged particle beam toward points in a fourth region of the lamella, each point in the fourth region receiving a dose of ions from the charged particle beam; and
the second region and the fourth regions being separated by a fifth region having a thickness greater than the thickness of the second region or of the fourth region, the points in the fifth region receiving a dose of ions that is less than the dose of ions received at points in the second region or the fourth region, thereby producing reinforcing ribs between the second region and the fourth region to mechanically strengthen the lamella.

9. The method of claim 1 , in which directing the charged particle beam toward points in a first region of the lamella and directing the charged particle beam toward points in a second region of the lamella, comprise directing the beam at an angle of less than 30 degrees to the surface of the lamella.

10. The method of claim 1 , directing the charged particle beam toward points in a first region of the lamella and directing the charged particle beam toward points in a second region of the lamella produce a first region having the same thickness as the second region.

11. The method of claim 1 , directing the charged particle beam toward points in a first region of the lamella and directing the charged particle beam toward points in a second region of the lamella produce a first region having a different thickness from the second region.

12. The method of claim 1 further comprising:
directing the charged particle beam to mill the first region on a second side of the lamella, each point on the second side of the lamella in the first milled region receiving a dose of ions from the charged particle beam;
directing the charged particle beam to mill a second region on the first side of the lamella, each point in the second milled region receiving a dose of ions from the charged particle beam;
the first region and the second region being separated by a third region having a thickness greater than the thickness of the first region or of the second region, the points in the third region receiving a dose of ions that is less than the dose of ions received at points in the first region or the second region, thereby producing reinforcing ribs between the first region and the second region to mechanically strengthen the lamella; and
point receiving a dose of ions from the charged particle beam.

13. The method of claim 1 further comprising further comprising repeatedly directing the charged particle beam toward the work piece to mill at least one additional thin region separated from the first or second region by a thicker region having a width less than 3 μm.

14. A method for preparing a thin, reinforced lamellar structure using a charged particle beam system, comprising:
directing a charged particle beam toward a work piece to form a lamella having a thickness of less than 300 nm;
extracting the lamella from the work piece;
attaching the lamella to a TEM grid;
directing the charged particle beam toward the top of the lamella to mill a first region on a first side of the lamella, the charged particle beam milling from the top of the lamella to the bottom of the lamella;
directing the charged particle beam to mill a second region on the first side of the lamella, the charged particle beam milling from the top of the lamella to the bottom of the lamella; and
the first region and the second region being separated by a third region having a thickness greater than the thickness of the first region or of the second region, thereby producing a reinforcing rib between the first region and the second region to mechanically strengthen the lamella.

15. The method of claim 14 further comprising repetitively directing the charged particle beam to the top of the lamella to mill additional thin regions on the lamella, the additional thin regions extending from the top of the lamella to the bottom of the lamella, the thin regions being separated by thick regions.

16. The method of claim 15 in which one or more of the additional thin regions are less than 50 nm thick and in which the thick regions are greater than 75 nm thick.

17. A lamella for viewing on a transmission electron microscope, the sample comprising:
an edge portion at both sides of the lamella, the edge portions having thicknesses of between 100 nm and 400 nm;
multiple thin regions having thicknesses of less than 100 nm; and
multiple thicker regions separating the thin regions, the multiple thin regions extending from the top of the lamella to the bottom of the lamella.

18. The lamella of claim 17 in which the multiple thin regions comprise more than 5 thin regions.

19. The lamella of claim 18 in which the multiple thin regions comprise more than 10 thin regions.

20. The lamella of claim 17 in which the multiple thin regions each has the same thickness.

21. The lamella of claim 17 in which at least one of the multiple thin regions has a thickness different from the thickness of another one of the multiple thin regions.

22. The lamella of claim 17 in which the multiple thicker regions have a width of less than ¼ the width of the thin regions.

23. The lamella of claim 17 in which at least one of the multiple

Assignees

• Fei Co

Inventors

• Geurts Remco Theodorus Johannes Petrus
• Vystavel Tomas

Classifications

• H01J37/31

  for cutting or drilling · CPC title

• H01J2237/3174

  Etching microareas · CPC title

• H01J37/3023 Primary

  Program control · CPC title

• H01J37/317 Primary

  for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation (H01J37/36 takes precedence) · CPC title

• H01J37/3056

  for microworking, e. g. etching of gratings or trimming of electrical components · CPC title