Plasma treating a process chamber

Patent metadata

Field	Value
Publication number	US-9831091-B2
Application number	US-201615171001-A
Country	US
Kind code	B2
Filing date	Jun 2, 2016
Priority date	Jun 5, 2015
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

Embodiments described herein generally relate to a method and apparatus for plasma treating a process chamber. A substrate having a gate stack formed thereon may be placed in a process chamber, and hydrogen containing plasma may be used to treat the gate stack in order to cure the defects in the gate stack. As the result of hydrogen containing plasma treatment, the gate stack has lower leakage and improved reliability. To protect the process chamber from H x + ions and H* radicals generated by the hydrogen containing plasma, the process chamber may be treated with a plasma without the substrate placed therein and prior to the hydrogen containing plasma treatment. In addition, components of the process chamber that are made of a dielectric material may be coated with a ceramic coating including an yttrium containing oxide in order to protect the components from the plasma.

First claim

The invention claimed is:

1. A method, comprising:
introducing a first one or more gases into a process chamber;
energizing the first one or more gases into a first plasma;
placing a substrate into the process chamber, wherein a stack is disposed on the substrate;
introducing a second one or more gases into the process chamber;
energizing the second one or more gases into a second plasma; and
repeating the introducing a first one or more gases into a process chamber, the energizing the first one or more gases into a first plasma, the placing a substrate into the process chamber, the introducing a second one or more gases into the process chamber, and the energizing the second one or more gases into a second plasma.

2. The method of claim 1 , wherein the first one or more gases comprise O 2 , N 2 , NH 3 , Ar, H 2 , or combination thereof.

3. The method of claim 2 , wherein radicals in the first plasma bond with surfaces of components of the process chamber to form protected surface bonds that are resistive to hydrogen containing plasma attack.

4. The method of claim 1 , wherein the second one or more gases comprise a hydrogen containing gas.

5. The method of claim 4 , wherein the second one or more gases further comprises an inert gas.

6. The method of claim 5 , wherein the second one or more gases comprises Ar and H2.

7. A method, comprising:
introducing a first one or more gases into a process chamber, wherein the first one or more gases comprise O 2 , N 2 , NH 3 , Ar, H 2 , or combination thereof;
energizing the first one or more gases into a first plasma;
placing a substrate into the process chamber, wherein a stack is disposed on the substrate;
introducing a second one or more gases into the process chamber, wherein the second one or more gases comprises H 2 ;
energizing the second one or more gases into a second plasma; and
repeating the introducing a first one or more gases into the process chamber, the energizing the first one or more gases into a first plasma, the placing a substrate into the process chamber, the introducing a second one or more gases into the process chamber, and the energizing the second one or more gases into a second plasma.

8. The method of claim 7 , wherein radicals in the first plasma bond with surfaces of components of the process chamber to form protected surface bonds that are resistive to hydrogen containing plasma attack.

9. The method of claim 7 , wherein the second one or more gases further comprises an inert gas.

10. The method of claim 9 , wherein the second one or more gases comprises Ar and H 2 .

Assignees

• Applied Materials Inc

Inventors

• Liu Wei
• Guarini Theresa Kramer
• Nguyen Huy Q
• Bevan Malcolm
• Graoui Houda
• Bottini Philip A
• Hwang Bernard L
• Hawrylchak Lara
• George Rene

Classifications

• H10P95/00 Primary

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10D64/01338 Primary

  with a treatment, e.g. annealing, after the formation of the conductor · CPC title

• H01J37/3244

  Gas supply means · CPC title

• H01J37/321

  the radio frequency energy being inductively coupled to the plasma · CPC title

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title