Sputter target and sputtering methods

Patent metadata

Field	Value
Publication number	US-9831072-B2
Application number	US-201214129911-A
Country	US
Kind code	B2
Filing date	Jun 14, 2012
Priority date	Jun 30, 2011
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

The present disclosure concerns sputter targets and sputtering methods. In particular, sputter targets and methods of sputtering using conventional sputter targets as well as sputter targets described herein, for highly uniform sputter deposition, are described.

First claim

What is claimed is:

1. A method of using a sputter target assembly to sputter deposit material of a layer of an electrochromic device onto a work surface of a substrate, the sputter target assembly comprising two or more sputter target sections assembled on a backing support to form gaps between edges of adjacent target sections, the method comprising:
(a) providing the substrate in a sputter chamber; and
(b) passing the substrate past the sputter target assembly while sputtering the material of the layer of the electrochromic device onto the work surface of the substrate, the substrate passing in a direction that is not aligned with the gaps between adjacent sputter target sections;
wherein passing the substrate past the sputter target assembly exposes the entire work surface of the substrate to the same ratio of sputter target surface area to area of the gaps between edges of adjacent sputter target sections.

2. The method of claim 1 , wherein adjacent target sections are configured such that each of the gaps is at an angle with respect to the sputter target surface of the adjacent target sections, wherein while passing the substrate past the sputter target assembly so that there is no line of sight to between the work surface of the substrate and the backing support in a direction orthogonal to a surface of the backing support.

3. The method of claim 1 , wherein the backing support is a backing plate, and wherein each of said two or more sputter target sections:
i) is affixed to the backing plate; and
ii) has a substantially planar sputter surface that is substantially co-planar with the other sputter surface or surfaces of said two or more sputter target sections.

4. The method of claim 1 , wherein the backing support is a backing tube, and wherein the two or more sputter target sections are each cylindrical sleeve segments that, when assembled, form a cylindrical target assembly.

5. The method of claim 4 , wherein the edges of the adjacent sputter target sections have overlapping regions that prevent said line of sight to the backing tube.

6. The method of claim 1 , wherein (b) comprises a reciprocating translational motion of the substrate past the sputter target assembly.

7. The method of claim 1 , wherein each of the one or more gaps is curved.

8. The method of claim 1 , wherein the material being sputtered onto the work surface includes one of indium tin oxide, aluminum zinc oxide, indium zinc oxide, lithium, or a lithium compound.

9. The method of claim 1 , where the material being sputtered onto the work surface includes an alloy, a compound, an oxide, or a nitride of a material including one of tungsten, molybdenum, vanadium, titanium, nickel, copper, aluminum, silicon, tantalum, and niobium.

Assignees

• Parker Ronald M
• Rozbicki Robert T
• View Inc

Inventors

• Parker Ronald M
• Rozbicki Robert T

Classifications

• H01J37/3417 Primary

  Arrangements · CPC title

• H01J37/3414

  Targets · CPC title

• C23C14/3407

  Cathode assembly for sputtering apparatus, e.g. Target · CPC title

• H01J37/3435

  Target holders (includes backing plates and endblocks) · CPC title

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title