Method for making patterned carbon nanotube array and carbon nanotube device
US-9481125-B2 · Nov 1, 2016 · US
US9826317B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9826317-B2 |
| Application number | US-201514609600-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 30, 2015 |
| Priority date | Jul 21, 2014 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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A thermoacoustic device includes a base, a first electrode and a second electrode, at least two supporting members, and a first carbon nanotube film. The base includes a surface. The first electrode and the second electrode are located on the surface of the base and spaced from each other. The at least two supporting members are spaced from each other and respectively located on surfaces of the first electrode and the second electrode. The at least two supporting members include a plurality of carbon nanotubes parallel with each other and substantially perpendicular to the surface of the base. The first carbon nanotube film is supported by the at least two supporting members and has a portion between the at least two supporting members suspended above the base. The supporting members electrically connect the first carbon nanotube film with the first electrode and the second electrode.
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What is claimed is: 1. A method for making a thermoacoustic device, the method comprising: providing a base of the thermoacoustic device, and the base comprising a surface; forming a first electrode and a second electrode on the surface; transferring a carbon nanotube array from a growing substrate to the base, the carbon nanotube array covering the first electrode and the second electrode, the carbon nanotube array comprises a second surface that is adjacent to the base and a first surface away from the base, the carbon nanotube array having an ability to have a second carbon nanotube film drawn therefrom, and the second carbon nanotube film comprises a plurality of carbon nanotubes joined end to end; laser etching the first surface of the carbon nanotube array to divide the carbon nanotube array into a preserving area and a removing area, the preserving area is an area of the carbon nanotube array that covers the first electrode and the second electrode, and the removing area is an area of the carbon nanotube array except an area covering the first electrode and the second electrode; drawing the second carbon nanotube film from the removing area and leaving carbon nanotubes in the preserving area to form supporting members on the first electrode and the second electrode; and placing a first carbon nanotube film on the supporting members, and the first carbon nanotube film being suspended between the supporting members. 2. The method of claim 1 , wherein the transferring the carbon nanotube array comprising: providing the growing substrate having the carbon nanotube array grown thereon, the carbon nanotube array having the first surface adjacent to the growing substrate and the second surface away from the growing substrate, and the carbon nanotube array having the ability to have a carbon nanotube film drawn therefrom; contacting the surface to the second surface; and separating the base from the growing substrate, thereby separating the first surface from the growing substrate to transfer the carbon nanotube array from the growing substrate to the base, and the carbon nanotube array still having the ability to have a carbon nanotube film drawn therefrom. 3. The method of claim 1 , wherein the transferring the carbon nanotube array comprises: providing the growing substrate having the carbon nanotube array thereon, the carbon nanotube array having the first surface adjacent to the growing substrate and the second surface away from the growing substrate, the carbon nanotube array having the ability to have a carbon nanotube film drawn therefrom; placing the base on the second surface of the carbon nanotube array and sandwiching liquid medium between the base and the carbon nanotube array; solidifying the liquid medium between the base and the carbon nanotube array into solid medium; separating the base from the growing substrate, thereby separating the first surface of the carbon nanotube array from the growing substrate; and removing the solid medium between the base and the carbon nanotube array, wherein the carbon nanotube array still having the ability to have a carbon nanotube film drawn therefrom. 4. The method of claim 3 , wherein the sandwiching the liquid medium between the base and the carbon nanotube array comprises: forming the liquid medium on the second surface of the carbon nanotube array; and contacting the surface of the base and the liquid medium on the second surface with each other. 5. The method of claim 4 , wherein the solidifying the liquid medium between the base and the carbon nanotube array comprises contacting the base having a temperature below a freezing point with the liquid medium on the second surface of the carbon nanotube array. 6. The method of claim 3 , wherein the sandwiching the liquid medium between the base and the carbon nanotube array comprises: forming the liquid medium on the surface of the base; and contacting the second surface of the carbon nanotube array and the liquid medium on the surface of the base with each other. 7. The method of claim 3 , wherein the solidifying the liquid medium between the base and the carbon nanotube array comprises placing a lamination of the growing substrate, the carbon nanotube array, the liquid medium, and the base into an area, the area having a temperature below a freezing point of the liquid medium. 8. The method of claim 3 , wherein the liquid medium is water, the solid medium is ice. 9. The method of claim 3 , wherein the laser etching the carbon nanotube array forms an etching groove on the first surface. 10. The method of claim 9 , wherein a depth of the etching groove is smaller than or equal to a height of the carbon nanotube array.
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