Polymer, chemically amplified positive resist composition and patterning process

Patent metadata

Field	Value
Publication number	US-9810983-B2
Application number	US-201615185195-A
Country	US
Kind code	B2
Filing date	Jun 17, 2016
Priority date	Jun 19, 2015
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A positive resist composition comprising a polymer comprising recurring units having both an acyl or alkoxycarbonyl group and an acid labile group-substituted hydroxyl group exhibits a high contrast of alkaline dissolution rate before and after exposure, a high resolution, a good pattern profile and minimal edge roughness.

First claim

The invention claimed is:

1. A polymer comprising recurring units (a1) having the general formula (1):

wherein R 1 is —C(═O)—R 4 , —O—C(═O)—R 4 or —C(═O)—O—R 4 , R 2 is hydrogen or methyl, R 3 is an acid labile group, and R 4 is a straight or branched C 1 -C 4 alkyl group or C 2 -C 4 alkenyl group, the polymer having a weight average molecular weight of 1,000 to 500,000.

2. The polymer of claim 1 wherein R 3 is an acid labile group selected from the group consisting of t-butyl, t-pentyl, methylcyclopentyl, ethylcyclopentyl, methylcyclohexyl, ethylcyclohexyl, methyladamantyl, ethyladamantyl, t-butoxycarbonyl, t-pentyloxycarbonyl and —CR 5 R 6 —O—R 7 wherein R 5 and R 6 are each independently hydrogen or a straight or branched C 1 -C 4 alkyl group, and R 7 is a straight, branched or cyclic C 1 -C 12 alkyl group or C 2 -C 12 alkenyl group.

3. The polymer of claim 1 , further comprising recurring units (b) having an adhesive group selected from the group consisting of hydroxyl, carboxyl, lactone ring, carbonate, thiocarbonate, carbonyl, cyclic acetal, ether, ester, sulfonic acid ester, cyano, amide, and —O—C(═O)—G— wherein G is sulfur or NH, the recurring units (a1) and (b) being incorporated in a fraction: 0<a1<1.0, 0<b<1.0, and 0.05≦a1+b≦1.0.

4. The polymer of claim 3 wherein the recurring units (b) are units having a phenolic hydroxyl group.

5. The polymer of claim 4 wherein the recurring units having a phenolic hydroxyl group are units selected from the group consisting of recurring units represented by the general formula (2) and mixtures thereof:

wherein R 8 is hydrogen or methyl, X 1 and X 2 each are a single bond or —C(═O)—O—R 9 —, X 3 and X 4 each are —C(═O)—O—R 9 —, R 9 is a single bond or a straight, branched or cyclic C 1 —C 10 alkylene group, Y 1 and Y 2 each are methylene or ethylene, Z 1 is methylene, oxygen or sulfur, p is 1 or 2, b1 to b8 are numbers representing fractions incorporated in the polymer, the sum of b1 to b8 represents the fraction b incorporated in the polymer, and b1 to b8 are in the range: 0≦b1<1.0, 0≦b2<1.0, 0≦b3<1.0, 0≦b4<1.0, 0≦b5<1.0, 0≦b6<1.0, 0≦b7<1.0, 0≦b8<1.0, and 0<b1+b2+b3+b4+b5+b6+b7+b8<1.0.

6. The polymer of claim 1 , further comprising recurring units (a2) having the general formula (5):

wherein R 34 is hydrogen or methyl, R 35 is an acid labile group, Y 3 is a single bond, a divalent C 1 -C 12 linking group having an ester moiety, ether moiety or lactone ring, phenylene group or naphthylene group, a2 is a number representing a fraction of recurring unit (a2) incorporated in the polymer, and is in the range: 0<a2<1.0.

7. The polymer of claim 1 , further comprising recurring units (c) selected from the group consisting of recurring units of derivatives of: indene, acenaphthylene, chromone, coumarin, and norbornadiene represented by the general formula (3), and mixtures thereof:

wherein R 10 to R 14 are each independently hydrogen, C 1 -C 30 alkyl, halo-substituted C 1 -C 30 alkyl, C 1 -C 8 alkoxy, C 1 -C 8 alkanoyl, C 2 -C 8 alkoxycarbonyl, C 6 -C 10 aryl, halogen, or 1,1,1,3,3,3-hexafluoro-2-propanol, Z 2 is methylene, oxygen or sulfur, c1 to c5 are numbers representing fractions incorporated in the polymer, and c1 to c5 are in the range: 0≦c1<1.0, 0≦c2<1.0, 0≦c3<1.0, 0≦c4<1.0, 0≦c5<1.0, and 0<c1+c2+c3+c4+c5<1.0.

8. The polymer of claim 1 , further comprising recurring units (d) derived from an onium salt having polymerizable olefin as an acid generator, the recurring units (d) being units selected from the group consisting of recurring units of sulfonium salt, represented by the general formula (4), and mixtures thereof:

wherein R 20 , R 24 , and R 29 each are hydrogen or methyl, R 21 is a single bond, phenylene, —O—R 28 —, or —C(═O)—Y 4 —R 28 —, Y 4 is oxygen or NH, R 28 is a straight, branched or cyclic C 1 -C 6 alkylene, phenylene or alkenylene group, which may contain a carbonyl, ester, ether or hydroxyl moiety, R 22 , R 23 , R 25 , R 26 , R 27 , R 30 , R 31 , and R 32 are each independently a straight, branched or cyclic C 1 -C 12 alkyl, C 6 -C 12 aryl or C 7 -C 20 aralkyl group, which may contain a carbonyl, ester or ether moiety, Z 3 is a single bond, methylene, ethylene, phenylene, fluorophenylene, —O—R 33 —, or —C(═O)—Z 4 —R 33 —, Z 4 is oxygen or NH, R 33 is a straight, branched or cyclic C 1 -C 6 alkylene, phenylene or alkenylene group, which may contain a carbonyl, ester, ether or hydroxyl moiety, M − is a non-nucleophilic counter ion, d1, d2 and d3 are numbers representing fractions incorporated in the polymer, and d1, d2 and d3 are in the range of 0≦d1≦0.5, 0≦d2≦0.5, 0≦d3≦0.5, and 0 <d1+d2+d3≦0.5.

9. A chemically amplified positive resist composition comprising the polymer of claim 1 , and an organic solvent.

10. The resist composition of claim 9 , further comprising a dissolution regulator.

11. The resist composition of claim 9 , further comprising at least one additive selected from the group consisting of an acid generator, a basic compound and a surfactant.

12. A pattern forming process comprising the steps of coating the positive resist composition of claim 9 onto a substrate, baking the coating to form a resist film, exposing the resist film to high-energy radiation, and developing the exposed resist film in a developer.

13. The process of claim 12 wherein the high-energy radiation is KrF excimer laser, ArF excimer laser, soft X-ray of wavelength 3 to 15 nm, or electron beam.

Assignees

• Shinetsu Chemical Co

Inventors

• Hatakeyama Jun
• Hasegawa Koji
• Sagehashi Masayoshi

Classifications

• C08F20/38

  Esters containing sulfur · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/0046

  with perfluoro compounds, e.g. for dry lithography (G03F7/0048 takes precedence) · CPC title

• C08F20/18

  with acrylic or methacrylic acids · CPC title

• G03F7/0397

  the macromolecular compound having an alicyclic moiety in a side chain · CPC title