Writer pole formation

Patent metadata

Field	Value
Publication number	US-9805756-B2
Application number	US-201615202373-A
Country	US
Kind code	B2
Filing date	Jul 5, 2016
Priority date	Oct 1, 2014
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

Implementations disclosed herein provide a method of reducing the topography at the alignment and overlay marks area during the writer pole photolithography process in order to reduce the wafer scale variation and reduce the writer pole photolithography process rework rate. In one implementation, an intermediate stage of a wafer for writer pole formation is generated by removing a part of at least one metallic writer pole layer on top of an intermediate stage writer pole wafer to form a recovery trench, depositing an optically transparent material on top of the wafer, wherein the thickness of the optically transparent material is higher than a target recovery trench topography, forming a photoresist pattern on top of the optically transparent material over the recovery trench, etching the optically transparent material, and removing the photoresist pattern and at least part of the remaining optically transparent material.

First claim

What is claimed is:

1. A wafer, comprising:
a substrate,
a writer pole material deposited on top of the substrate;
a recovery trench positioned in between the writer pole material and above the substrate; and
an optically transparent material deposited into the recovery trench, wherein the top of the optically transparent material is etched so as to be substantially aligned to the top surface of the writer pole material and the optically transparent material substantially fills the entirety of the recovery trench.

2. The wafer of claim 1 , further comprising at least one of an overlay mark and an alignment mark on a bottom surface of the substrate.

3. The wafer of claim 1 , wherein the optically transparent material is etched in a wet etching process.

4. The wafer of claim 1 , wherein the optically transparent material is alumina.

5. The wafer of claim 1 , wherein depositing the optically transparent material is performed by sputtering.

6. The wafer of claim 1 , wherein depositing the optically transparent material is performed by plasma enhanced vapor deposition.

7. The wafer of claim 1 , wherein depositing the optically transparent material is performed by atomic layer deposition.

8. The wafer of claim 1 , further comprising a photoresist pattern formed on top of the optically transparent material over the recovery trench.

9. The wafer of claim 8 , wherein the photoresist pattern and at least part of a remaining optically transparent material is removed.

10. The wafer of claim 9 , wherein least part of the optically transparent material is removed with a chemical mechanical process.

11. The wafer of claim 8 , wherein etching the optically transparent material includes etching optically transparent material on the top of the wafer on sides of the photoresist pattern generated over the recovery trench.

12. The wafer of claim 8 , wherein forming the photoresist pattern includes performing photolithography.

13. An intermediate stage writer pole wafer comprising:
a substrate,
writer pole material deposited on top of the substrate;
a recovery trench positioned in between writer pole material and above the substrate; and
alumina, wherein the top surface of the alumina is substantially at a same level as the top level of the remainder of the wafer and the alumina substantially fills the entirety of the recovery trench.

14. The intermediate stage writer pole wafer of claim 13 , wherein the recovery trench is located over at least one of an overlay mark and an alignment mark of the wafer.

15. The intermediate stage writer pole wafer of claim 13 , wherein depositing the alumina is performed by one of sputtering, plasma enhanced vapor deposition, and plasma enhanced vapor deposition.

16. The wafer of claim 13 , further comprising a photoresist pattern formed on top of the alumina over the recovery trench.

17. The intermediate stage writer pole wafer of claim 16 , wherein the alumina is wet etched, the photoresist is chemically removed, and at least part of a remaining part of the alumina is removed.

18. The intermediate stage writer pole wafer of claim 17 , wherein wet etching the alumina includes etching alumina on the top of the wafer on sides of a photoresist pattern generated over the recovery trench.

19. The intermediate stage writer pole wafer of claim 16 , wherein forming the photoresist pattern includes performing photolithography.

Assignees

• Seagate Technology Llc

Inventors

• Liu Yi
• Bowser Aaron M
• Yu Dan
• Zhang Xiaohong

Classifications

• H10W46/301

  for alignment · CPC title

• C23F4/04

  by physical dissolution · CPC title

• G03F9/708

  Mark formation · CPC title

• G11B5/314

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G11B5/855 Primary

  Coating only part of a support with a magnetic layer · CPC title