Exposure apparatus

Patent metadata

Field	Value
Publication number	US-9799489-B2
Application number	US-201715402500-A
Country	US
Kind code	B2
Filing date	Jan 10, 2017
Priority date	Feb 4, 2016
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

The invention provides an exposure apparatus ( 100 ) including a formation module ( 122 ) which forms charged particle beams with different irradiation positions on a specimen. The formation module ( 122 ) includes: a particle source ( 20 ) which emits the charged particle beams from an emission region ( 21 ) in which a width in a longitudinal direction is different from and a width in a lateral direction orthogonal to the longitudinal direction; an aperture array device ( 60 ) provided with openings ( 62 ) arranged in an illuminated region ( 61 ) in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction; illumination lenses ( 30, 50 ) provided between the particle source ( 20 ) and the aperture array device ( 60 ); and a beam cross-section deformation device ( 40 ) which is provided between the particle source ( 20 ) and the aperture array device ( 60 ), and deforms a cross-sectional shape of the charged particle beams into an anisotropic shape by an action of a magnetic field or an electric field.

First claim

The invention claimed is:

1. An exposure apparatus comprising:
a formation module configured to form a plurality of charged particle beams with different irradiation positions on a specimen, wherein
the formation module includes
a particle source configured to emit the charged particle beams from an emission region in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction,
an aperture array device provided with a plurality of openings arranged in an illuminated region in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction,
an illumination lens provided between the particle source and the aperture array device, and
a beam cross-section deformation device provided between the particle source and the aperture array device, and configured to deform a cross-sectional shape of the charged particle beams into a longer and thinner shape than a shape of the emission region by an action of any of a magnetic field and an electric field.

2. The exposure apparatus according to claim 1 , wherein the particle source includes:
a cathode unit having a tip end provided with a charged particle generation portion in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction, and
a control electrode provided with an opening in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction.

3. The exposure apparatus according to claim 2 , wherein
the longitudinal direction of the opening of the control electrode is substantially parallel to the longitudinal direction of the generation portion, and
a line being substantially parallel to the longitudinal direction of the opening of the control electrode and the longitudinal direction of the generation portion, and bisecting the width in the lateral direction of the opening of the control electrode substantially coincides with a line bisecting the width in the lateral direction of the generation portion, when viewed in a direction of beam emission from the particle source.

4. The exposure apparatus according to claim 1 , wherein the illumination lens is formed from at least two lenses including a particle source-side illumination lens and an aperture array-side illumination lens, the lenses being disposed at different positions.

5. The exposure apparatus according to claim 1 , wherein the illumination lens is a charged particle beam lens being axisymmetric with respect to an optical axis where the charged particle beams pass.

6. The exposure apparatus according to claim 1 , wherein the illumination lens is a rotation-free combination lens.

7. The exposure apparatus according to claim 4 , wherein the beam cross-section deformation device is disposed between the particle source-side illumination lens and the aperture array-side illumination lens and at a position where an image of the emission region is focused with the particle source-side illumination lens.

8. The exposure apparatus according to claims 1 , wherein the illuminated region on the aperture array device is provided at a position different from a position where an image of the emission region is focused with the illumination lens.

9. The exposure apparatus according to claim 2 , wherein
the generation portion has a substantially rectangular shape, and
a ratio of the width in the longitudinal direction to the width in the lateral direction of the generation portion is in a range from 5 to 50 inclusive.

10. The exposure apparatus according to claims 1 , wherein a ratio of the width in the longitudinal direction to the width in the lateral direction of the illuminated region on the aperture array device is in a range from 500 to 1000 inclusive.

Assignees

• Advantest Corp
• Advantest Corp

Inventors

• Hamaguchi Shinichi
• Tanaka Hitoshi
• Tokuno Atsushi
• Kojima Shinichi
• Yamada Akio

Classifications

• H01J37/065

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J37/09

  Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields · CPC title

• H01J2237/0453

  multiple apertures · CPC title

• H01J37/3177 Primary

  Multi-beam, e.g. fly's eye, comb probe · CPC title

• H01J2237/0835

  Variable cross-section or shape · CPC title