FINFET having notched fins and method of forming same

Patent metadata

Field	Value
Publication number	US-9786765-B2
Application number	US-201615044431-A
Country	US
Kind code	B2
Filing date	Feb 16, 2016
Priority date	Feb 16, 2016
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

One aspect of the disclosure provides for a method of forming a replacement gate structure. The method may include: removing a dummy gate from over a set of fins to form an opening in a dielectric layer exposing the set of fins, each fin in the set of fins being substantially separated from an adjacent fin in the set of fins via an dielectric; forming a protective cap layer within the opening over the exposed set of fins; removing a portion of the dielectric on each side of each fin in the set of fins; undercutting each fin by removing a portion of each fin in the set of fins to create a notch disposed under the protective cap layer; substantially filling each notch with an oxide; forming a gate dielectric over each fin in the set of fins; and forming a gate conductor over the gate dielectric, thereby forming the replacement gate structure.

First claim

We claim:

1. A method of forming a transistor, the method comprising:
removing a dummy gate from over a set of fins to form an opening in a dielectric layer exposing the set of fins, each fin in the set of fins being substantially separated from an adjacent fin in the set of fins via a dielectric;
forming a protective cap layer within the opening over the exposed set of fins;
removing a portion of the dielectric on each side of each fin in the exposed set of fins;
undercutting each fin in the exposed set of fins by removing a portion of each fin in the exposed set of fins to create a notch disposed under the protective cap layer;
substantially filling each notch with an insulator,
wherein the substantially filling of each notch includes forming the insulator such that a sidewall of the insulator is coplanar with a sidewall of the protective cap layer;

forming a gate dielectric over each fin in the exposed set of fins; and
forming a gate conductor over the gate dielectric, thereby forming the transistor.

2. The method of claim 1 , wherein the removing the portion of the dielectric includes performing a vertical oxide etch and performing a horizontal oxide etch.

3. The method of claim 1 , wherein the undercutting of each fin in the exposed set of fins includes performing a horizontal silicon etch.

4. The method of claim 3 , wherein undercutting of each fin in the exposed set of fins results in a portion of each fin having a width of approximately 5 nanometers (nm) to approximately 10 nm.

5. The method of claim 1 , wherein the substantially filling of each notch includes conformally depositing the insulator.

6. The method of claim 1 , further comprising:
removing the protective cap layer after the substantially filling of each notch with an insulator and before the forming of the gate dielectric.

7. The method of claim 1 , further comprising:
prior to the removing of the dummy gate, forming a fin-shaped field-effect-transistor (FINFET) on the substrate, the FINFET including the set of fins on the substrate and the dummy gate over the set of fins.

8. The method of claim 1 , wherein the forming of the protective cap layer includes epitaxially growing silicon germanium.

9. A method of forming an integrated circuit structure, the method comprising:
forming a fin-shaped field-effect-transistor (FINFET) on a substrate, the FINFET including a set of fins on the substrate, a dummy gate over the set of fins, and a dielectric substantially separating each fin in the set of fins from an adjacent fin in the set of fins;
removing the dummy gate stack to expose the set of fins;
forming a protective cap layer over the exposed set of fins;
removing a portion of dielectric on each side of each fin in the exposed set of fins;
undercutting each fin in the exposed set of fins by removing a portion of each fin in the exposed set of fins to create a notch disposed under the protective cap layer;
substantially filling each notch with an insulator,
wherein the substantially filling of each notch includes forming the insulator such that a sidewall of the insulator is coplanar with a sidewall of the protective cap layer;

forming a gate dielectric over each fin in the exposed set of fins; and
forming a gate conductor over the gate dielectric, thereby forming the integrated circuit structure.

10. The method of claim 9 , wherein the removing the portion of the dielectric includes performing a vertical oxide etch and performing a horizontal oxide etch.

11. The method of claim 9 , wherein undercutting of each fin in the exposed set of fins includes performing a horizontal silicon etch.

12. The method of claim 11 , wherein undercutting of each fin in the exposed set of fins results in a portion of each fin having a width of approximately 5 nanometers (nm) to approximately 10 nm.

13. The method of claim 9 , wherein the substantially filling of each notch includes conformally depositing the insulator.

14. The method of claim 9 , further comprising:
removing the protective cap layer after the substantially filling of each notch with the insulator and before the forming of the gate dielectric.

15. A fin-shaped field-effect-transistor (FINFET) comprising:
a set of fins on a substrate, each fin in the set of fins being separated from an adjacent fin in the set of fins by a dielectric;
wherein each fin in the set of fins includes a notched first portion having a width that is smaller than a remaining portion of the fin;

an insulator being disposed over the dielectric and being adjacent to the notched first portion of each fin in the set of fins;
a gate dielectric being disposed over a portion of the insulator and over a second portion of each fin in the set of fins, and wherein the gate dielectric contacts an entire sidewall of the insulator; and
a gate conductor over the gate dielectric,
wherein the notched first portion of each fin in the set of fins is covered by the gate conductor, and
wherein the notched first portion is disposed beneath the gate dielectric and gate conductor and does not extend into source and drain regions of each fin in the set of fins.

16. The FINFET of claim 15 , further comprising a protective cap layer disposed between the gate dielectric and the second portion of each fin in the set of fins.

17. The FINFET of claim 15 , wherein the notched first portion of each fin in the set of fins includes a width of approximately 5 nanometers (nm) to approximately 10 nm.

18. The FINFET of claim 15 , wherein the gate dielectric includes silicon oxide.

19. The FINFET of claim 15 , wherein the gate conductor includes at least one of: tungsten, tantalum, and titanium.

20. The FINFET of claim 15 , wherein the insulator layer includes at least one of: silicon dioxide, silicon oxynitride, fluorinated silicon dioxide, or oxynitride.

Assignees

• Globalfoundries Inc

Inventors

• Nowak Edward J
• Anderson Brent A
• Scholze Andreas

Classifications

• H10D64/01316

  the conductor comprising a layer of elemental metal contacting the insulator, e.g. Ta, W, Mo or Al · CPC title

• H10D30/6212

  having fin-shaped semiconductor bodies having non-rectangular cross-sections · CPC title

• H10D30/024 Primary

  of fin field-effect transistors [FinFET] · CPC title

• H01L29/66545 Primary

  Electricity · mapped topic

• H01L29/66795

  Electricity · mapped topic