Wafer cleaning

Patent metadata

Field	Value
Publication number	US-9781994-B2
Application number	US-201213707947-A
Country	US
Kind code	B2
Filing date	Dec 7, 2012
Priority date	Dec 7, 2012
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

One or more techniques or systems for cleaning wafers during semiconductor fabrication or an associated brush are provided herein. In some embodiments, the brush includes a brush body and one or more inner hole supports within the brush body. For example, a first inner hole support and a second inner hole support define a first inner hole associated with a first size. For another example, a third inner hole support and a fourth inner hole support define a second inner hole associated with a second size different than the first size. In some embodiments, a cleaning solution is applied to a wafer based on a first flow rate at a first brush position and based on a second flow rate at a second brush position. In this manner, a flow field associated with wafer cleaning is provided, thus enhancing cleaning efficiency, for example.

First claim

What is claimed is:

1. A brush for cleaning wafers during semiconductor fabrication, comprising:
a brush body, wherein:
the brush body has a center region spaced proximate to an axis of rotation about which the brush body rotates and a distal region spaced away from the axis of rotation,
the brush body has two edges and a mid-point disposed on the axis of rotation,
the mid-point is between the two edges, and
the brush body comprises:
a first inner hole support and a second inner hole support defining a first inner hole intersected by a first axis extending parallel to the axis of rotation, wherein:
the first inner hole has a first size as measured along the first axis, and
at least some fluid is dispensed from the brush body in a direction from the center region to the distal region through the first inner hole;

a third inner hole support and a fourth inner hole support defining a second inner hole intersected by the first axis, wherein:
the second inner hole has a second size as measured along the first axis,
the second size is different than the first size, and
at least some of the fluid is dispensed from the brush body in the direction from the center region to the distal region through the second inner hole; and

a fifth inner hole support and a sixth inner hole support defining a third inner hole intersected by the first axis, wherein:
the third inner hole is nearer to the mid-point of the brush body than the first inner hole and the second inner hole are to the mid-point,
the third inner hole has a third size as measured along the first axis,
the third size is greater than the first size and the second size such that a flow rate of the fluid near the mid-point is greater than the flow rate near the two edges of the brush body, and
at least some of the fluid is dispensed from the brush body in the direction from the center region to the distal region through the third inner hole.

2. The brush of claim 1 , wherein the brush body comprises a brush bar.

3. The brush of claim 1 , wherein at least one of the first inner hole support or the second inner hole support is closer to a first edge of the two edges than at least one of the third inner hole support or the fourth inner hole support is to the first edge.

4. The brush of claim 1 , wherein the second inner hole support and the third inner hole support are a same inner hole support.

5. The brush of claim 1 , wherein the fourth inner hole support and the fifth inner hole support are a same inner hole support.

6. The brush of claim 1 , wherein:
the first inner hole support is closer to a first edge of the two edges than the second inner hole support is to the first edge,
the second inner hole support is closer to the first edge than the third inner hole support is to the first edge;
the third inner hole support is closer to the first edge than the fourth inner hole support is to the first edge;
the fourth inner hole support is closer to the first edge than the fifth inner hole support is to the first edge; and
the fifth inner hole support is closer to the first edge than the sixth inner hole support is to the first edge.

7. The brush of claim 1 , wherein the first size is less than the second size.

8. The brush of claim 1 , wherein the first inner hole support and the second inner hole support are disposed between the center region and the distal region.

9. The brush of claim 1 , comprising a flow meter configured to control a flow rate of the fluid flowing into the center region.

10. The brush of claim 1 , comprising a pressure transducer configured to control a pressure of the fluid flowing into the center region.

11. A brush for cleaning wafers during semiconductor fabrication, comprising:
a brush body, wherein:
the brush body has a center region spaced proximate to an axis of rotation about which the brush body rotates and a distal region spaced away from the axis of rotation,
the brush body has two edges and a mid-point disposed on the axis of rotation,
the mid-point is between the two edges,
the brush body dispenses a fluid flowing into the center region of the brush body, and
the brush body defines:
a first inner hole intersected by a first axis extending parallel to the axis of rotation and having a first size as measured along the first axis,
a second inner hole intersected by the first axis and having a second size as measured along the first axis, and
a third inner hole intersected by the first axis and having a third size as measured along the first axis, wherein:
the third inner hole is nearer to the mid-point of the brush body than the first inner hole and the second inner hole are to the mid-point,
the third size is greater than the first size and the second size such that a flow rate of the fluid near the mid-point is greater than the flow rate near the two edges of the brush body, and
the second size is different than the first third size.

12. The brush of claim 11 , wherein the fluid flows from the center region to the distal region through the first inner hole, the second inner hole, and the third inner hole.

13. The brush of claim 11 , comprising a flow meter configured to control a flow rate of the fluid flowing into the center region of the brush body.

14. The brush of claim 11 , comprising a pressure transducer configured to control a pressure of the fluid flowing into the center region of the brush body.

15. The brush of claim 11 , wherein the brush body comprises a brush bar.

16. A brush for cleaning wafers during semiconductor fabrication, comprising:
a brush body configured to rotate about an axis of rotation and comprising:
a center region proximate to the axis of rotation;
a distal region spaced away from the axis of rotation; and
a plurality of inner hole supports lying along a first axis parallel to the axis of rotation and disposed between the center region and the distal region to define openings, intersected by the first axis, through which fluid is dispensed from the brush body in a direction from the center region to the distal region, wherein:
the brush body has a first edge extending perpendicular to the axis of rotation, a second edge extending perpendicular to the axis of rotation, and a mid-point between the first edge and the second edge, and
a size of the openings, measured along the first axis, continuously decrease from the mid-point to the first edge.

17. The brush of claim 16 , wherein a size of the openings, measured along the first axis, continuously decrease from the mid-point to the second edge.

18. The brush of claim 16 , wherein the brush body comprises a brush bar.

19. The brush of claim 11 , wherein an opening at the mid-point is larger in size, measured along the first axis, than any other opening intersected by the first axis.

20. The brush of claim 11 , comprising a flow meter configured to control a flow rate of the fluid flowing into the center region.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Yu Shang-Yuan
• Chen Ming-Te
• Yu Chi-Fu
• Ku Shao-Yen
• Chung Tzu-Yang
• Chien-Wen Hsiao
• Lin Shan-Ching

Classifications

• H10P72/0411

  for wet cleaning or washing · CPC title

• H10P72/0412

  using mainly scrubbing means, e.g. brushes · CPC title

• H10P50/00 Primary

  Etching of wafers, substrates or parts of devices · CPC title

• A46B11/00 Primary

  Brushes with reservoir or other means for applying substances, e.g. paints, pastes, water (driven brush bodies A46B13/00; {massage apparatus with liquid delivery A61H7/002, A61H2201/105}; applying liquids or other fluent materials to surfaces by liquid carrying members in general, e.g. by pads B05C1/00, B05D1/28) · CPC title

• H01L21/67046

  Electricity · mapped topic